Patents by Inventor Alexander Tonkikh

Alexander Tonkikh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11942756
    Abstract: The invention relates to a radiation-emitting semiconductor chip comprising a semiconductor layer sequence having at least two active regions which generate electromagnetic radiation during operation and at least one reflective outer surface which is arranged to the side of each active region wherein the reflective outer surface includes an angle of at least 35° and at most 55° with a main extension plane of the semiconductor chip. The invention also relates to a method for producing a radiation-emitting semiconductor chip.
    Type: Grant
    Filed: January 8, 2020
    Date of Patent: March 26, 2024
    Assignee: OSRAM OPTO SEMICONDUCTORS GMBH
    Inventors: Bruno Jentzsch, Alexander Tonkikh
  • Publication number: 20240021753
    Abstract: A light-emitting diode (LED) device can include a mesa with a sidewall encompassing a first semiconductor layer, a second semiconductor layer, and an active region between the first semiconductor layer and the second semiconductor layer. The first semiconductor layer and the second semiconductor layer are oppositely doped. The active region includes a quantum well. The LED device can further include at least one epitaxial layer grown over the sidewall of the mesa. The at least one epitaxial layer comprises a semiconductor material having a wider bandgap than a semiconductor material of the quantum well and is configured to induce compressive or tensile strain in the quantum well. The compressive or tensile strain causes a bandgap of a peripheral portion of the quantum well to differ from a bandgap of a central portion of the quantum well, thereby tuning an emission profile (e.g., wavelength and/or intensity) of the LED device.
    Type: Application
    Filed: July 13, 2022
    Publication date: January 18, 2024
    Inventors: Alexander TONKIKH, Berthold HAHN, Michael GRUNDMANN, John Joseph CURLEY, Rajesh BALACHANDRAN
  • Publication number: 20230420483
    Abstract: Described are LED devices and corresponding manufacturing techniques. In some embodiments, an LED device includes a first doped semiconductor layer, a second doped semiconductor layer having an opposite doping, and a two-dimensional (2D) array of light emitting cells. Each light emitting cell corresponds to a mesa of an individual pixel and includes at least one quantum well. The 2D array is located between the first doped semiconductor layer and the second doped semiconductor layer. The LED device further includes a flattening layer between the first doped semiconductor layer and the 2D array. The flattening layer comprises an undoped quantum barrier (QB) layer that completely covers sidewalls of each light emitting cell in the 2D array. The undoped QB layer quantum mechanically isolates the light emitting cells from each other. The flattening or undoped QB layer may also protect the light emitting cells against etch-induced defects during a mesa pixelation process.
    Type: Application
    Filed: September 5, 2023
    Publication date: December 28, 2023
    Inventors: Yong Tae MOON, Alexander TONKIKH, Liang ZHANG, Shenghui LEI, Ezzah Azimah BINTI ALIAS, David MASSOUBRE, Christophe Antoine HURNI
  • Patent number: 11848194
    Abstract: A lateral micro-light emitting diode includes a first semiconductor layer, an active region on the first semiconductor layer and including one or more quantum well layers configured to emit light, a p-type semiconductor region on a first lateral region (e.g., a central region) of the active region, and an n-type semiconductor region on a second lateral region (e.g., peripheral regions) of the active region, where the n-type semiconductor region and the p-type semiconductor region are on a same side of the active region.
    Type: Grant
    Filed: May 13, 2021
    Date of Patent: December 19, 2023
    Assignee: META PLATFORMS TECHNOLOGIES, LLC
    Inventors: Alexander Tonkikh, Guillaume Lheureux, Markus Broell, Berthold Hahn
  • Publication number: 20230369537
    Abstract: A light source includes a p-type semiconductor layer, an n-type semiconductor layer, and an active region between the p-type semiconductor layer and the n-type semiconductor layer and configured to emit light. The active region includes a plurality of barrier layers and one or more quantum well layers. The one or more quantum well layers include at least one quantum well layer that is doped with both n-type dopants and p-type dopants. A net carrier concentration of the at least one quantum well layer is between about 1×1017 /cm3 and about 10×1017 /cm3. The n-type dopants include, for example, Si, Ge, S, Se, or Te. The p-type dopants include, for example, C, Mg, Be, or Zn. The active region is characterized by a lateral linear dimension equal to or less than about 10 µm.
    Type: Application
    Filed: April 7, 2023
    Publication date: November 16, 2023
    Inventors: Pavel GORLACHUK, Arjun AJAYKUMAR, Alexander TONKIKH
  • Patent number: 11784287
    Abstract: A micro-light emitting diode includes a mesa structure that includes a first set of one or more semiconductor layers, an active layer configured to emit light, a second set of one or more semiconductor layers on the active layer, and a dielectric layer in sidewall regions of the mesa structure. A center region of the second set of one or more semiconductor layers is thicker than a sidewall region of the second set of one or more semiconductor layers, such that a distance from a surface of the sidewall region of the second set of one or more semiconductor layers to the active layer is less than a distance from a surface of the center region of the second set of one or more semiconductor layers to the active layer, thereby forming a surface potential-induced lateral potential barrier at a sidewall region of the active layer.
    Type: Grant
    Filed: May 26, 2021
    Date of Patent: October 10, 2023
    Assignee: META PLATFORMS TECHNOLOGIES, LLC
    Inventors: Alexander Tonkikh, Michael Grundmann, Alexander Franke
  • Publication number: 20230307584
    Abstract: A micro-light emitting diode includes a semiconductor mesa structure that includes at least a portion of an n-type semiconductor layer, an active region configured to emit visible light, and a p-type semiconductor layer. The micro-LED device also includes an insulator layer that includes an undoped semiconductor passivation layer grown on sidewalls of the semiconductor mesa structure, and a dielectric passivation layer characterized by a refractive index lower than a refractive index of the undoped semiconductor passivation layer. The micro-LED device further includes a reflective metal layer deposited on the dielectric passivation layer, and a micro-lens configured to collimate the visible light emitted by the active region, where a ratio between a width of the micro-lens and a width of the active region may be greater than about 1.5.
    Type: Application
    Filed: March 24, 2022
    Publication date: September 28, 2023
    Inventors: Alexander Tonkikh, Salim Boutami, Sophia Antonia Fox
  • Publication number: 20230268459
    Abstract: LED devices and corresponding techniques for manufacturing LED devices are described. In some embodiments, an LED device includes a plurality of mesas, each mesa corresponding to a separate LED and including a layered semiconductor structure. The layered semiconductor structure includes an active region and a quantum barrier (QB) layer. The active region has a matrix of quantum well (QW) cells that are quantum mechanically isolated by the QB layer. In particular, the QB layer can include ridge-shaped structures that laterally separate adjacent QW cells. The matrix of QW cells can be arranged as a two-dimensional array. In some embodiments, the QW cells are epitaxially grown such that each QW cell is thicker along a central region and thinner along a peripheral region, with the peripheral region corresponding to where the QW cell meets a ridge-shaped structure of the QB layer.
    Type: Application
    Filed: May 11, 2022
    Publication date: August 24, 2023
    Inventors: Yong Tae MOON, Alexander TONKIKH, Christophe Antoine HURNI
  • Publication number: 20230155074
    Abstract: A red light-emitting micro-LED wafer includes a silicon substrate, a GaP buffer layer grown on the silicon substrate, a first doped (e.g., p-doped) GaP contact layer on the GaP buffer layer, an active region, and a second doped (e.g., n-doped) GaP contact layer on the active region. The active region includes a plurality of InGaP quantum barrier layers and one or more InGaAsP quantum well layers, where each of the one or more InGaAsP quantum well layers is sandwiched by two InGaP barrier layers of the plurality of InGaP barrier layers and is configured to emit red light. In some embodiments, the red light-emitting micro-LED wafer also includes a first doped AlGaP cladding layer between the first doped GaP contact layer and the active region, and a second doped AlGaP cladding layer between the second doped GaP contact layer and the active region.
    Type: Application
    Filed: November 7, 2022
    Publication date: May 18, 2023
    Inventors: Pavel GORLACHUK, Alexander TONKIKH, Christopher PYNN
  • Publication number: 20230131918
    Abstract: A micro-light emitting diode (micro-LED) wafer includes a substrate, an n-type semiconductor layer grown on the substrate, an active region grown on the n-type semiconductor layer and configured to emit visible light, and a p-type semiconductor layer grown on the active region. The active region includes a compressive-strained quantum well layer and compressive-strained quantum barrier layers. At least one of the p-type semiconductor layer or the n-type semiconductor layer includes a tensile-strained layer having a thickness greater than about 50 nm, such that the tensile-strained layers can counter the compressive strain of the active region, thereby reducing the overall strain and bow of the micro-LED wafer.
    Type: Application
    Filed: October 25, 2021
    Publication date: April 27, 2023
    Inventor: Alexander TONKIKH
  • Publication number: 20230028464
    Abstract: In an embodiment an optoelectronic device includes an epitaxial layer stack having at least a first epitaxial layer and a second epitaxial layer arranged above the first epitaxial layer, wherein the following layers are embedded in the epitaxial layer stack a first semiconductor layer of a first conductivity type, an active layer arranged above the first semiconductor layer and configured to generate light, and a second semiconductor layer of a second conductivity type arranged above the active layer, wherein an interface between the first epitaxial layer and the second epitaxial layer extends at least partially through the first semiconductor layer and/or the second semiconductor layer, and wherein the active layer is embedded in a non-doped barrier layer, the barrier layer covering one or more side surfaces of the active layer.
    Type: Application
    Filed: December 9, 2020
    Publication date: January 26, 2023
    Inventor: Alexander Tonkikh
  • Publication number: 20220384679
    Abstract: A micro-light emitting diode includes a mesa structure that includes a first set of one or more semiconductor layers, an active layer configured to emit light, a second set of one or more semiconductor layers on the active layer, and a dielectric layer in sidewall regions of the mesa structure. A center region of the second set of one or more semiconductor layers is thicker than a sidewall region of the second set of one or more semiconductor layers, such that a distance from a surface of the sidewall region of the second set of one or more semiconductor layers to the active layer is less than a distance from a surface of the center region of the second set of one or more semiconductor layers to the active layer, thereby forming a surface potential-induced lateral potential barrier at a sidewall region of the active layer.
    Type: Application
    Filed: May 26, 2021
    Publication date: December 1, 2022
    Inventors: Alexander TONKIKH, Michael GRUNDMANN, Alexander FRANKE
  • Publication number: 20220367751
    Abstract: A lateral micro-light emitting diode includes a first semiconductor layer, an active region on the first semiconductor layer and including one or more quantum well layers configured to emit light, a p-type semiconductor region on a first lateral region (e.g., a central region) of the active region, and an n-type semiconductor region on a second lateral region (e.g., peripheral regions) of the active region, where the n-type semiconductor region and the p-type semiconductor region are on a same side of the active region.
    Type: Application
    Filed: May 13, 2021
    Publication date: November 17, 2022
    Inventors: Alexander TONKIKH, Guillaume LHEUREUX, Markus BROELL, Berthold HAHN
  • Patent number: 11495939
    Abstract: A semiconductor laser is provided that includes a semiconductor layer sequence and electrical contact surfaces. The semiconductor layer sequence includes a waveguide with an active zone. Furthermore, the semiconductor layer sequence includes a first and a second cladding layer, between which the waveguide is located. At least one oblique facet is formed on the semiconductor layer sequence, which has an angle of 45° to a resonator axis with a tolerance of at most 10°. This facet forms a reflection surface towards the first cladding layer for laser radiation generated during operation. A maximum thickness of the first cladding layer is between 0.5 M/n and 10 M/n at least in a radiation passage region, wherein n is the average refractive index of the first cladding layer and M is the vacuum wavelength of maximum intensity of the laser radiation.
    Type: Grant
    Filed: March 5, 2019
    Date of Patent: November 8, 2022
    Assignee: OSRAM OLED GMBH
    Inventors: Bruno Jentzsch, Alvaro Gomez-Iglesias, Alexander Tonkikh, Stefan Illek
  • Publication number: 20220271192
    Abstract: In one embodiment, the invention relates to an optoelectronic semiconductor chip comprising a semiconductor layer sequence. The semiconductor layer sequence has an n-conducting first layer region, a p-conducting second layer region and an active zone lying therebetween for generating radiation. The second layer region comprises a first subregion directly adjacent to the active zone, the first subregion being composed of p-conducting InvAl1?vP. The second layer region also comprises a second subregion directly adjacent to the first subregion, the second subregion having p-conducting Iny(GaxAl1?x)1?yP. The second layer region also comprises a third subregion as a p-contact layer directly adjacent to the second subregion.
    Type: Application
    Filed: July 17, 2020
    Publication date: August 25, 2022
    Inventor: Alexander TONKIKH
  • Patent number: 11398586
    Abstract: A light-emitting semiconductor device (100) comprising a semiconductor layer sequence (1) based on a phosphide and/or arsenide compound semiconductor material system is specified, wherein—the semiconductor layer sequence (1) comprises a light-emitting semiconductor layer (10), which is embodied to emit light during operation of the semiconductor device (100), between a first cladding layer (11) and a second cladding layer (12), and at least a first semiconductor protection layer (13), the first semiconductor protection layer (13) is arranged inside the first cladding layer (11), wherein the first cladding layer is formed as an outer layer, or the first semiconductor protection layer is arranged as an outer layer directly on the first cladding layer (11) on a side remote from the light-emitting semiconductor layer (10), and the first semiconductor protection layer (13) has a lower aluminum content than the first cladding layer.
    Type: Grant
    Filed: September 3, 2018
    Date of Patent: July 26, 2022
    Assignee: OSRAM OLED GMBH
    Inventors: Alexander Tonkikh, Britta Göötz
  • Publication number: 20220209044
    Abstract: A micro-light emitting diode (micro-LED) includes a substrate, an n-type semiconductor layer on the substrate, a p-type semiconductor layer, and an active region between the n-type semiconductor layer and the p-type semiconductor layer and configured to emit red light. The active region includes a barrier layer characterized by a first lattice constant, and a quantum well layer next to the barrier layer. The quantum well layer is characterized by a second lattice constant greater than the first lattice constant and by an in-plane compressive strain. The active region has a lateral linear dimension equal to or less than about 10 ?m.
    Type: Application
    Filed: November 19, 2021
    Publication date: June 30, 2022
    Inventors: Christopher PYNN, Alexander TONKIKH
  • Patent number: 11374152
    Abstract: Provided is an optoelectronic semiconductor chip including a semiconductor layer sequence in which an active zone for generating radiation is located between a first semiconductor region and a second semiconductor region. A first electrical contact of the semiconductor layer sequence is applied to the first semiconductor region. A second electrical contact is applied to the second semiconductor region. The second electrical contact is located in a trench of the second semiconductor region. The trench is restricted to the second semiconductor region and ends at a distance from the active zone. A distance between a bottom of the trench and the active zone is at most 3 ?m.
    Type: Grant
    Filed: May 3, 2019
    Date of Patent: June 28, 2022
    Assignee: OSRAM OLED GMBH
    Inventors: Stefan Heckelmann, Andreas Rudolph, Alexander Tonkikh
  • Publication number: 20220069160
    Abstract: An optoelectronic semiconductor device comprises an active zone comprising sub-layers for forming a quantum well structure. Differences in energy levels of the quantum well structure are smaller in a central region of the optoelectronic semiconductor device than in an edge region of the optoelectronic semiconductor device. According to further embodiments, an optoelectronic semiconductor device comprises an active zone comprising a sub-layer which is suitable for forming a quantum well structure. In the active zone, quantum dot structures are formed in a central region of the optoelectronic semiconductor device. No quantum dot structures are formed in an edge region of the optoelectronic semiconductor device.
    Type: Application
    Filed: December 18, 2019
    Publication date: March 3, 2022
    Inventors: Martin BEHRINGER, Alexander TONKIKH, Tansen VARGHESE
  • Publication number: 20220059985
    Abstract: The invention relates to a radiation-emitting semiconductor chip comprising a semiconductor layer sequence having at least two active regions which generate electromagnetic radiation during operation and at least one reflective outer surface which is arranged to the side of each active region wherein the reflective outer surface includes an angle of at least 35° and at most 55° with a main extension plane of the semiconductor chip. The invention also relates to a method for producing a radiation-emitting semiconductor chip.
    Type: Application
    Filed: January 8, 2020
    Publication date: February 24, 2022
    Inventors: Bruno Jentzsch, Alexander Tonkikh