Abstract: One embodiment of the invention includes a vibrating-mass gyroscope system. The system includes a sensor system comprising a vibrating-mass and a plurality of electrodes coupled to the vibrating-mass that are configured to facilitate in-plane motion of the vibrating-mass. The system also includes a gyroscope controller configured to generate a drive signal that is provided to a first set of the plurality of electrodes to provide an in-plane periodic oscillatory motion of the vibrating-mass along a drive axis, to generate a force-rebalance signal that is provided to a second set of the plurality of electrodes to calculate a rotation of the vibrating-mass gyroscope system about an input axis, and to generate a quadrature signal that is provided to a third set of the plurality of electrodes to substantially mitigate quadrature effects associated with the vibrating-mass.

Abstract: One embodiment includes a gyroscope system. The system includes a sensor system comprising a vibrating-mass and electrodes each arranged to provide one of a driving force and a force-rebalance to the vibrating-mass in each of three orthogonal axes. The system also includes a gyroscope controller that generates a drive signal provided to a first electrode of the electrodes to provide the driving force to facilitate an in-plane periodic oscillatory motion of the vibrating-mass along a first axis of the three orthogonal axes. The gyroscope controller also generates a force-rebalance signal provided to each of a second electrode and a third electrode of the plurality of electrodes associated with a respective second axis and a respective third axis of the three orthogonal axes to calculate a rotation of the gyroscope system about the respective second axis and the respective third axis of the three orthogonal axes.

Abstract: One example includes a hemispherical resonator gyroscope (HRG). The HRG includes a sensing system comprising a plurality of electrodes arranged in a symmetrical annular arrangement about a sensitive axis and configured to electrostatically force a resonator into a substantially periodic motion based on a plurality of forcer signals applied to the plurality of electrodes. The plurality of electrodes are configured to provide an indication of rotation about a sensitive axis of the HRG. The HRG also includes a controller configured to generate the plurality of forcer signals in a phase-disparate manner to provide the substantially periodic motion in a vibration pattern such that a ratio of the plurality of electrodes and the vibration pattern is a non-integer number, and to measure the rotation about the sensitive axis of the HRG in response to the plurality of forcer signals.

Abstract: One embodiment includes a gyroscope system. The system includes a sensor system comprising a vibrating-mass and electrodes each arranged to provide one of a driving force and a force-rebalance to the vibrating-mass in each of three orthogonal axes. The system also includes a gyroscope controller that generates a drive signal provided to a first electrode of the electrodes to provide the driving force to facilitate an in-plane periodic oscillatory motion of the vibrating-mass along a first axis of the three orthogonal axes. The gyroscope controller also generates a force-rebalance signal provided to each of a second electrode and a third electrode of the plurality of electrodes associated with a respective second axis and a respective third axis of the three orthogonal axes to calculate a rotation of the gyroscope system about the respective second axis and the respective third axis of the three orthogonal axes.

Abstract: One embodiment describes an inertial system. The system includes a gyroscope system comprising a plurality of gyroscopes. The gyroscope system can be configured to provide rotation rate data associated with rotation of the plurality of gyroscopes about a respective plurality of sensitive axes. The system also includes a rotation sensor system configured to calculate navigation data based on the rotation rate data. The rotation sensor system includes a self-calibration component configured to designate a first gyroscope of the plurality of gyroscopes for self-calibration during operation of the inertial system and to inject a calibration input signal into the first gyroscope. The self-calibration component being configured to calibrate the first gyroscope based on the rotation rate data of the first gyroscope corresponding to the calibration input signal relative to the rotation rate data associated with a remaining at least one of the plurality of gyroscopes.

Abstract: One example includes a hemispherical resonator gyroscope (HRG). The HRG includes a sensing system comprising a plurality of electrodes arranged in a symmetrical annular arrangement about a sensitive axis and configured to electrostatically force a resonator into a substantially periodic motion based on a plurality of forcer signals applied to the plurality of electrodes. The plurality of electrodes are configured to provide an indication of rotation about a sensitive axis of the HRG. The HRG also includes a controller configured to generate the plurality of forcer signals in a phase-disparate manner to provide the substantially periodic motion in a vibration pattern such that a ratio of the plurality of electrodes and the vibration pattern is a non-integer number, and to measure the rotation about the sensitive axis of the HRG in response to the plurality of forcer signals.

Abstract: A method for self-compensation of the bias draft of the quadrature signal of a gyroscope. The method is a combination of a variety of sub-methods, which can include quadrature compensation, can be used to achieve the highest possible stability. The calibration methods include a temperature self-sensing algorithm utilizing the drive-mode resonance frequency for calibration of thermal drift in the mechanical parameters of the system, a sideband-ratio approach for direct detection of mechanical drive-mode amplitude, modifying the AC and DC components of the amplitude gain control (AGC) for improved stability, and an approach for compensation of thermal drift in the sense-mode pick off system by utilizing mechanical quadrature. By using some or all of the four methods of calibration above, the highest level of long term in-run bias stability can be achieved.

Abstract: One example includes a resonator gyroscope. The resonator gyroscope includes a sensing system comprising a plurality of electrodes arranged about a sensitive axis and configured to electrostatically force a resonator into a substantially periodic motion based on a plurality of forcer signals applied to the plurality of electrodes, and configured to provide an indication of rotation about a sensitive axis of the resonator gyroscope. The resonator gyroscope further includes a controller configured to generate the plurality of forcer signals to provide the substantially periodic motion of the resonator concurrently in each of a plurality of separate vibration pattern modes to measure the rotation of the resonator gyroscope about the sensitive axis in response to a plurality of pickoff signals associated with the substantially periodic motion.

Abstract: One embodiment describes an inertial system. The system includes a gyroscope system comprising a plurality of gyroscopes. The gyroscope system can be configured to provide rotation rate data associated with rotation of the plurality of gyroscopes about a respective plurality of sensitive axes. The system also includes a rotation sensor system configured to calculate navigation data based on the rotation rate data. The rotation sensor system includes a self-calibration component configured to designate a first gyroscope of the plurality of gyroscopes for self-calibration during operation of the inertial system and to inject a calibration input signal into the first gyroscope. The self-calibration component being configured to calibrate the first gyroscope based on the rotation rate data of the first gyroscope corresponding to the calibration input signal relative to the rotation rate data associated with a remaining at least one of the plurality of gyroscopes.

Abstract: One embodiment of the invention includes a vibrating-mass gyroscope system. The system includes a sensor system comprising a vibrating-mass and a plurality of electrodes coupled to the vibrating-mass that are configured to facilitate in-plane motion of the vibrating-mass. The system also includes a gyroscope controller configured to generate a drive signal that is provided to a first set of the plurality of electrodes to provide an in-plane periodic oscillatory motion of the vibrating-mass along a drive axis, to generate a force-rebalance signal that is provided to a second set of the plurality of electrodes to calculate a rotation of the vibrating-mass gyroscope system about an input axis, and to generate a quadrature signal that is provided to a third set of the plurality of electrodes to substantially mitigate quadrature effects associated with the vibrating-mass.

Abstract: One embodiment of the invention includes a vibrating-mass gyroscope system. The system includes a sensor system comprising a vibrating-mass and a plurality of electrodes coupled to the vibrating-mass that are configured to facilitate in-plane motion of the vibrating-mass. The system also includes a gyroscope controller configured to generate a drive signal that is provided to a first set of the plurality of electrodes to provide an in-plane periodic oscillatory motion of the vibrating-mass along a drive axis, to generate a force-rebalance signal that is provided to a second set of the plurality of electrodes to calculate a rotation of the vibrating-mass gyroscope system about an input axis, and to generate a quadrature signal that is provided to a third set of the plurality of electrodes to substantially mitigate quadrature effects associated with the vibrating-mass.

Abstract: A multi-axis microelectromechanical-systems (MEMS) inertial measurement unit (IMU) is fabricated in a vacuum sealed single packaged device. An FM vibratory gyroscope and an FM resonant accelerometer both for generating FM output signals is fabricated in the silicon chip using MEMS. A signal processor is coupled to the an FM vibratory gyroscope and to the FM resonant accelerometer for receiving the FM gyroscopic output signals and the FM accelerometer output signals. The signal processor generates simultaneous and decoupled measurement of input acceleration, input rotation rate, and temperature and/or temperature distribution within the IMU, self-calibration of the biases and scale factors of the IMU and its support electronics against temperature variations and other common mode errors, and reduction of the cross axis sensitivity by reducing acceleration errors in the gyroscope and rotation errors in the accelerometer.

Abstract: One embodiment of the invention includes a vibrating-mass gyroscope system. The system includes a sensor system comprising a vibrating-mass and a plurality of electrodes coupled to the vibrating-mass that are configured to facilitate in-plane motion of the vibrating-mass. The system also includes a gyroscope controller configured to generate a drive signal that is provided to a first set of the plurality of electrodes to provide an in-plane periodic oscillatory motion of the vibrating-mass along a drive axis, to generate a force-rebalance signal that is provided to a second set of the plurality of electrodes to calculate a rotation of the vibrating-mass gyroscope system about an input axis, and to generate a quadrature signal that is provided to a third set of the plurality of electrodes to substantially mitigate quadrature effects associated with the vibrating-mass.

Abstract: A multi-axis microelectromechanical-systems (MEMS) inertial measurement unit (IMU) is fabricated in a vacuum sealed single packaged device. An FM vibratory gyroscope and an FM resonant accelerometer both for generating FM output signals is fabricated in the silicon chip using MEMS. A signal processor is coupled to the an FM vibratory gyroscope and to the FM resonant accelerometer for receiving the FM gyroscopic output signals and the FM accelerometer output signals. The signal processor generates simultaneous and decoupled measurement of input acceleration, input rotation rate, and temperature and/or temperature distribution within the IMU, self-calibration of the biases and scale factors of the IMU and its support electronics against temperature variations and other common mode errors, and reduction of the cross axis sensitivity by reducing acceleration errors in the gyroscope and rotation errors in the accelerometer.

Abstract: A z-axis gyroscope design is presented with a 2-degree of freedom (DOF) sense mode allowing interchangeable operation in either precision (mode-matched) or robust (wide-bandwidth) modes. This is accomplished using a complete 2-DOF coupled system which allows for the specification of the sense mode resonant frequencies and coupling independent of frequency. By decoupling the frame connecting the sense system to a central anchor, x-y symmetry is preserved while enabling a fully coupled 2-DOF sense mode providing control over both the bandwidth and the amount of coupling independent of operational frequency. The robust mode corresponds to operation between the 2-DOF sense mode resonant frequencies providing a response gain and bandwidth controlled by frequency spacing. Precision mode of operation, however, relies on mode-matching the drive to the second, anti-phase sense mode resonant frequency which can be designed to provide a gain advantage over a similar 1-DOF system.

Abstract: A vibratory sensor is fabricated as a three-dimensional batch-micromachined shell adapted to vibrate and support elastic wave propagation and wave precession in the shell or membrane and at least one driving electrode and preferably a plurality of driving electrodes directly or indirectly coupled to the shell to excite and sustain the elastic waves in the shell. The pattern of elastic waves is determined by the configuration of the driving electrode(s). At least one sensing electrode and preferably a plurality of sensing electrodes are provided to detect the precession of the elastic wave pattern in the shell. The rotation of the shell induces precession of the elastic wave pattern in the shell which is usable to measure the rotation angle or rate of the vibratory sensor.

Abstract: A multi-axis microelectromechanical-systems (MEMS) inertial measurement unit (IMU) is fabricated in a vacuum sealed single packaged device. An FM vibratory gyroscope and an FM resonant accelerometer both for generating FM output signals is fabricated in the silicon chip using MEMS. A signal processor is coupled to the an FM vibratory gyroscope and to the FM resonant accelerometer for receiving the FM gyroscopic output signals and the FM accelerometer output signals. The signal processor generates simultaneous and decoupled measurement of input acceleration, input rotation rate, and temperature and/or temperature distribution within the IMU, self-calibration of the biases and scale factors of the IMU and its support electronics against temperature variations and other common mode errors, and reduction of the cross axis sensitivity by reducing acceleration errors in the gyroscope and rotation errors in the accelerometer.

Abstract: A MEMS resonator includes two resonating masses having an anti-phase and in-phase resonance mode, each mode having a resonance frequency, and an anti-phase resonance levering system coupled to the two resonating masses to stiffen and/or dampen the in-phase resonance mode while leaving the anti-phase resonance mode compliant. This effectively raises the in-phase resonance frequency above the anti-phase resonance frequency, and potentially creates a large frequency separation between the two resonance modes. This reduces the energy transfer between the two modes, allowing for robustness to external acceleration, because the in-phase mode is of a higher frequency. The anti-phase resonance levering system is disposed between the two resonating masses as an internal levering mechanism, or is disposed around the two resonating masses as an external levering mechanism.

Abstract: A method for self-compensation of the bias draft of the quadrature signal of a gyroscope. The method is a combination of a variety of sub-methods, which can include quadrature compensation, can be used to achieve the highest possible stability. The calibration methods include a temperature self-sensing algorithm utilizing the drive-mode resonance frequency for calibration of thermal drift in the mechanical parameters of the system, a sideband-ratio approach for direct detection of mechanical drive-mode amplitude, modifying the AC and DC components of the amplitude gain control (AGC) for improved stability, and an approach for compensation of thermal drift in the sense-mode pick off system by utilizing mechanical quadrature. By using some or all of the four methods of calibration above, the highest level of long term in-run bias stability can be achieved.

Abstract: A high temperature micro-glassblowing process and a novel inverted-wineglass architecture that provides self-aligned stem structures. The fabrication process involves the etching of a fused quartz substrate wafer. A TSG or fused quartz device layer is then bonded onto the fused quartz substrate, creating a trapped air pocket or cavity between the substrate and the TSG device layer. The substrate and TSG device layer 14 are then heated at an extremely high temperature of approximately 1700° C., forming an inverted wineglass structure. Finally, the glassblown structure is cut or etched from the substrate to create a three dimensional wineglass resonator micro-device. The inverted wineglass structure may be used as a high performance resonator for use as a key element in precision clock resonators, dynamic MEMS sensors, and MEMS inertial sensors.