Patents by Inventor Alexander Voronov
Alexander Voronov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240002283Abstract: A method of manufacturing a glass includes forming a first etch protection layer on a first surface of a glass substrate, and forming a second etch protection layer on a second surface of the glass substrate; removing a part of the first protection layer and a part of the second protection layer by applying a laser pulse penetrating the glass substrate from above the first surface of the glass substrate; forming a cut part in the glass substrate by etching the glass substrate using an etching solution; and removing the first etch protection layer and the second etch protection layer. The second surface is opposite to the first surface.Type: ApplicationFiled: September 13, 2023Publication date: January 4, 2024Inventors: ALEXANDER VORONOV, HYUNGSIK KIM, SUNGGYU PARK, JUNGHWA YOU, JOONGSUNG LEE, WOOHYUN JUNG, GYOOWAN HAN
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Patent number: 11802078Abstract: A method of manufacturing a glass includes forming a first etch protection layer on a first surface of a glass substrate, and forming a second etch protection layer on a second surface of the glass substrate; removing a part of the first protection layer and a part of the second protection layer by applying a laser pulse penetrating the glass substrate from above the first surface of the glass substrate; forming a cut part in the glass substrate by etching the glass substrate using an etching solution; and removing the first etch protection layer and the second etch protection layer. The second surface is opposite to the first surface.Type: GrantFiled: November 18, 2021Date of Patent: October 31, 2023Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Alexander Voronov, Hyungsik Kim, Sunggyu Park, Junghwa You, Joongsung Lee, Woohyun Jung, Gyoowan Han
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Publication number: 20230201962Abstract: A laser machining device includes: a broadband light source, which generates a broadband laser beam; a first lens unit to which the broadband laser beam is incident and having a first effective focal length; a second lens unit spaced apart from the first lens unit in a first direction and having a second effective focal length; a beam splitter disposed between the first lens unit and the second lens unit, and which is movable in the first direction and a direction opposite to the first direction within the first effective focal length from the first lens unit, and splits the broadband laser beam passing through the first lens unit into a plurality of sub-laser beams; and a focusing lens spaced apart from the second lens unit in the first direction, and which focuses the sub-laser beams passing through the second lens unit on a substrate.Type: ApplicationFiled: November 29, 2022Publication date: June 29, 2023Inventors: ALEXANDER VORONOV, HYUNGSIK KIM, JUNGHWA YOU, WOOHYUN JUNG, KYUNGHAN YOO
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Publication number: 20230194437Abstract: An inspection method includes irradiating a laser to an inspection target, reflecting a first emitted laser from a transmission layer included in the inspection target, reflecting a second emitted laser from a scattering layer included in the inspection target, detecting a reference image from the second emitted laser; and measuring a separation distance obtained from the first emitted laser, based on the reference image.Type: ApplicationFiled: November 30, 2022Publication date: June 22, 2023Applicant: Samsung Display Co., LTD.Inventors: Alexander Voronov, Jooseob Ahn, Hyeonsuk Guak, Kihun Kim, Jekil Ryu, Hyeongmin Ahn
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Publication number: 20230135389Abstract: An optical system includes a phase retardation plate which controls a polarization of an input laser beam, an axicon lens spaced apart from the phase retardation plate on an emitting surface side thereof to convert the input laser beam into a single first Bessel beam having a single cone angle, a collimating lens spaced apart from the axicon lens on an emitting surface side thereof to collimate the single first Bessel beam in a form of a single second Bessel beam having an annular energy distribution, a polarizing beam splitter spaced apart from the collimating lens on an emitting surface side thereof to split the single second Bessel beam into third Bessel beams having different polarization directions, and a focusing lens spaced apart from the polarizing beam splitter on an emitting surface side thereof to focus the plurality of third Bessel beams to form an output laser beam.Type: ApplicationFiled: November 2, 2022Publication date: May 4, 2023Inventors: Konstantin MISHCHIK, Alexander VORONOV, Hyungsik KIM
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Publication number: 20220297236Abstract: An apparatus for manufacturing a deposition mask including a stage on which a mask substrate is mounted, a light source configured to irradiate a laser beam, a beam splitter configured to split the irradiated laser beam into a plurality of laser beams, a scanner configured to simultaneously scan the plurality of laser beams onto the mask substrate, and a tuner configured to finely change irradiation states of the plurality of laser beams to correspond to shapes of a plurality of pattern holes, while the plurality of laser beams are scanned.Type: ApplicationFiled: June 12, 2022Publication date: September 22, 2022Inventors: Taekil OH, Gyoowan HAN, Wonyong KIM, Seungho Myoung, Jaeseok Park, Alexander VORONOV, Jinhong JEUN
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Publication number: 20220201874Abstract: A foldable display device including: a flexible display module including a first area, a second area, and a foldable area between the first area and the second area; a first support part disposed under the flexible display module, and including a plurality of first carbon fibers extending in a first direction; and a second support part disposed under the first support part, and including a plurality of second carbon fibers extending in a second direction.Type: ApplicationFiled: November 29, 2021Publication date: June 23, 2022Inventors: JUNGHWA YOU, ALEXANDER VORONOV, HYUNGSIK KIM, JOONGSUNG LEE, JEKIL RYU, SUNGGYU PARK, WOOHYUN JUNG, GYOOWAN HAN
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Patent number: 11358240Abstract: A method of manufacturing a deposition mask includes: a splitting process in which a laser beam irradiated from a light source is split into a plurality of laser beams; a scanning process in which the plurality of laser beams are simultaneously scanned onto the mask substrate; and a tuning process in which irradiation states of the plurality of laser beams are finely changed to correspond to shapes of the plurality of pattern holes while the plurality of laser beams are scanned.Type: GrantFiled: May 7, 2018Date of Patent: June 14, 2022Assignee: Samsung Display Co., Ltd.Inventors: Taekil Oh, Gyoowan Han, Wonyong Kim, Seungho Myoung, Jaeseok Park, Alexander Voronov, Jinhong Jeun
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Publication number: 20220162117Abstract: A method of manufacturing a glass includes forming a first etch protection layer on a first surface of a glass substrate, and forming a second etch protection layer on a second surface of the glass substrate; removing a part of the first protection layer and a part of the second protection layer by applying a laser pulse penetrating the glass substrate from above the first surface of the glass substrate; forming a cut part in the glass substrate by etching the glass substrate using an etching solution; and removing the first etch protection layer and the second etch protection layer. The second surface is opposite to the first surface.Type: ApplicationFiled: November 18, 2021Publication date: May 26, 2022Inventors: ALEXANDER VORONOV, HYUNGSIK KIM, SUNGGYU PARK, JUNGHWA YOU, JOONGSUNG LEE, WOOHYUN JUNG, GYOOWAN HAN
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Publication number: 20220088702Abstract: Provided is a laser device. The laser device according to an embodiment comprises a laser source that provides a laser beam to a process object, a laser deflector that deflects the laser beam supplied from the laser source, an object lens that focuses scattered light of the laser beam that has been incident on the process object and then scattered, an image capture device that captures an image of the scattered light focused in the object lens, and a corrector that corrects a position of the laser beam by using the captured image.Type: ApplicationFiled: June 7, 2021Publication date: March 24, 2022Inventors: Alexander VORONOV, Gyoo Wan HAN, Woo Hyun JUNG, Jung Hwa YOU
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Patent number: 11253952Abstract: A laser processing apparatus includes a light source configured to generate a laser beam, and a light converging optical system configured to converge laser beam to a focal point at an object to be processed, the light converging optical system including a through-hole optical element and a composite optical element under the through-hole optical element, wherein the through-hole optical element includes a first recess portion configured as a concave mirror at a lower surface of the through-hole optical element, and wherein an upper surface of the composite optical element is convex and includes a first region configured to reflect the laser beam and a second region configured to transmit the laser beam.Type: GrantFiled: May 9, 2019Date of Patent: February 22, 2022Assignee: Samsung Display Co., Ltd.Inventors: Akifumi Sangu, Alexander Voronov, Hyoung-Joo Kim, Eun Sun Choi, Emil Aslanov, Gyoo Wan Han
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Patent number: 10877243Abstract: An F-theta lens includes a diffractive optical element and a plurality of spherical lenses. The diffractive optical element includes multi-level diffractive structure having three or more levels and defined on a surface thereof, and the diffractive optical element is arranged before the spherical lenses on a path of a laser beam.Type: GrantFiled: August 28, 2018Date of Patent: December 29, 2020Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Emil Aslanov, Alexander Voronov, Gyoo Wan Han
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Publication number: 20200180069Abstract: A laser processing apparatus according to an exemplary embodiment includes: a light source generating a laser beam; and a light converging unit converging the laser beam to a focal point on an object to be processed, wherein the light converging unit includes a first optical element including a through hole penetrating the first optical element; a second optical element including a first region reflecting the laser beam and a second region transmitting the laser beam; and a third optical element including a focusing lens as a convex lens, a lower surface of the first optical element is a concave mirror, and an upper surface of the second optical element is convex and a lower surface thereof is concave.Type: ApplicationFiled: October 18, 2019Publication date: June 11, 2020Inventors: Akifumi Sangu, Hyoung-Joo Kim, Alexander Voronov, Eun Sun Choi, Gyoo Wan Han
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Patent number: 10620136Abstract: A patterning apparatus includes a laser generator, at least one lens, a detector, and a controller. The laser generator generates a first laser beam and a second laser beam having different intensities. The at least one lens irradiates the first laser beam to form a pattern in a substrate, irradiates a second laser beam to determine a defect of the pattern, and condenses reflected beams generated as the second laser beam is reflected from the substrate. The detector converts the reflected beams to electrical signals. The controller determines a defect of the pattern based on the electrical signals.Type: GrantFiled: November 29, 2017Date of Patent: April 14, 2020Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Alexander Voronov, Gyoo Wan Han, Ku Hyun Kang
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Publication number: 20200101560Abstract: A laser processing apparatus includes a light source configured to generate a laser beam, and a light converging optical system configured to converge laser beam to a focal point at an object to be processed, the light converging optical system including a through-hole optical element and a composite optical element under the through-hole optical element, wherein the through-hole optical element includes a first recess portion configured as a concave mirror at a lower surface of the through-hole optical element, and wherein an upper surface of the composite optical element is convex and includes a first region configured to reflect the laser beam and a second region configured to transmit the laser beam.Type: ApplicationFiled: May 9, 2019Publication date: April 2, 2020Inventors: Akifumi SANGU, Alexander VORONOV, Hyoung-Joo KIM, Eun Sun CHOI, Emil ASLANOV, Gyoo Wan HAN
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Patent number: 10557756Abstract: A shearing interferometer includes first and second shearing plates disposed opposite to each other. The first shearing plate includes a first front surface and a first back surface, and splits an input beam input to the first front surface into first and second beams reflected at the first front and back surfaces, respectively. The second shearing plate includes a second front surface and a second back surface. The second shearing plate splits the first beam into third and fourth beams reflected at the second front and back surfaces, respectively, and splits the second beam into fifth and sixth beams reflected at the second front and back surfaces, respectively. Each of the first and second shearing plates has a thickness which limits a phase delay between the fourth beam and the fifth beam to a degree determined to allow interference to occur between the fourth beam and the fifth beam.Type: GrantFiled: October 9, 2018Date of Patent: February 11, 2020Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Emil Aslanov, Alexander Voronov, Gyoo Wan Han
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Publication number: 20190187416Abstract: An F-theta lens includes a diffractive optical element and a plurality of spherical lenses. The diffractive optical element includes multi-level diffractive structure having three or more levels and defined on a surface thereof, and the diffractive optical element is arranged before the spherical lenses on a path of a laser beam.Type: ApplicationFiled: August 28, 2018Publication date: June 20, 2019Inventors: Emil ASLANOV, Alexander VORONOV, Gyoo Wan HAN
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Publication number: 20190154514Abstract: A shearing interferometer includes first and second shearing plates disposed opposite to each other. The first shearing plate includes a first front surface and a first back surface, and splits an input beam input to the first front surface into first and second beams reflected at the first front and back surfaces, respectively. The second shearing plate includes a second front surface and a second back surface. The second shearing plate splits the first beam into third and fourth beams reflected at the second front and back surfaces, respectively, and splits the second beam into fifth and sixth beams reflected at the second front and back surfaces, respectively. Each of the first and second shearing plates has a thickness which limits a phase delay between the fourth beam and the fifth beam to a degree determined to allow interference to occur between the fourth beam and the fifth beam.Type: ApplicationFiled: October 9, 2018Publication date: May 23, 2019Inventors: Emil ASLANOV, Alexander VORONOV, Gyoo Wan HAN
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Publication number: 20190105736Abstract: A method of manufacturing a deposition mask includes: a splitting process in which a laser beam irradiated from a light source is split into a plurality of laser beams; a scanning process in which the plurality of laser beams are simultaneously scanned onto the mask substrate; and a tuning process in which irradiation states of the plurality of laser beams are finely changed to correspond to shapes of the plurality of pattern holes while the plurality of laser beams are scanned.Type: ApplicationFiled: May 7, 2018Publication date: April 11, 2019Inventors: Taekil OH, Gyoowan Han, Wonyong Kim, Seungho Myoung, Jaeseok Park, Alexander Voronov, Jinhong Jeun
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Publication number: 20180149604Abstract: A patterning apparatus includes a laser generator, at least one lens, a detector, and a controller. The laser generator generates a first laser beam and a second laser beam having different intensities. The at least one lens irradiates the first laser beam to form a pattern in a substrate, irradiates a second laser beam to determine a defect of the pattern, and condenses reflected beams generated as the second laser beam is reflected from the substrate. The detector converts the reflected beams to electrical signals. The controller determines a defect of the pattern based on the electrical signals.Type: ApplicationFiled: November 29, 2017Publication date: May 31, 2018Inventors: Alexander VORONOV, Gyoo Wan HAN, Ku Hyun KANG