Abstract: The invention provides a microelectromechanical system testing device, comprising an acoustic chamber having two opposing walls; a sound source for generating sound within the acoustic chamber at a first frequency in the range of 20 Hz to 10 kHz, the sound source being arranged at one of the opposing walls; and an interface for coupling one or more microelectromechanical systems thereto, the interface being arranged at the other of the two opposing walls and comprising a respective coupling site for each microelectromechanical system; wherein the acoustic chamber is adapted to have a total harmonic distortion (THD) at each coupling site of the interface for the first frequency below 1%, preferably below 0.8%, more preferably below 0.6%, most preferably below 0.4% when including all harmonics of the first frequency in the range of 20 Hz to 20 kHz, in particular for the first frequency being 1 kHz or 4 kHz.

Abstract: The invention provides a microelectromechanical system testing device, comprising an acoustic chamber having two opposing walls; a sound source for generating sound within the acoustic chamber at a first frequency in the range of 20 Hz to 10 kHz, the sound source being arranged at one of the opposing walls; and an interface for coupling one or more microelectromechanical systems thereto, the interface being arranged at the other of the two opposing walls and comprising a respective coupling site for each microelectromechanical system; wherein the acoustic chamber is adapted to have a total harmonic distortion (THD) at each coupling site of the interface for the first frequency below 1%, preferably below 0.8%, more preferably below 0.6%, most preferably below 0.4% when including all harmonics of the first frequency in the range of 20 Hz to 20 kHz, in particular for the first frequency being 1 kHz or 4 kHz.

Abstract: The present invention relates to a guide device comprising a baseplate unit having formed therein a guide channel for guiding electronic devices, wherein at least two portions of the baseplate unit are spatially fixed, said guide device being characterized in that means for compensating the thermal expansion of the baseplate unit are provided. The invention additionally relates to a test apparatus which comprises the guide device according to the present invention.

Abstract: The present invention relates to a guide device comprising a baseplate unit having formed therein a guide channel for guiding electronic devices, wherein at least two portions of the baseplate unit are spatially fixed, said guide device being characterized in that means for compensating the thermal expansion of the baseplate unit are provided. The invention additionally relates to a test apparatus which comprises the guide device according to the present invention.