Abstract: An imaging EUV optical unit serves images an object field into an image field. The imaging optical unit has a plurality of mirrors for guiding EUV imaging light along an imaging beam path. The plurality of the mirrors includes at least two normal incidence mirrors and at least one grazing incidence mirror. The last two mirrors in the imaging beam path are normal incidence mirrors and lack an imaging light passage opening. A reflection surface of an antepenultimate mirror in the imaging beam path faces the last mirror in the imaging beam path. This EUV optical unit can have improved usability for an EUV projection exposure apparatus.

Abstract: A projection exposure apparatus for semiconductor lithography includes a mirror and a temperature-regulating device for regulating temperature on the basis of radiation. The mirror includes at least one cutout. The temperature-regulating device includes a temperature-regulating body arranged without contact in the cutout of the mirror. The temperature-regulating body has a cavity. A fluid for temperature regulation of the temperature-regulating body is present in the cavity.

Abstract: The present invention applies to the field of glycerophospholipids (GPL) that may be used for biological studies. In particular, the invention relates to new GPL compounds comprising at least one reactive function which does not interfere with biological processes, to the process for preparing them, and to their uses in various applications.

Abstract: A facet assembly is a constituent part of a facet mirror for an illumination optical unit for projection lithography. The facet assembly has a facet with a reflection surface for reflecting illumination light. A facet main body of the facet assembly has at least one hollow chamber. A reflection surface chamber wall of the hollow chamber forms at least one portion of the reflection surface. An actuator control apparatus of the facet assembly is operatively connected to the hollow chamber for the controlled deformation of the reflection surface chamber wall. The result is a facet assembly that is usable flexibly as a constituent part of a facet mirror equipped therewith within an illumination optical unit for projection lithography.

Abstract: A device for detecting a trapping event of a motor-actuatable closing system of a vehicle includes sensor and reference sensor electrodes at least partially surrounding the edge of a vehicle opening closable by a closure element. A control unit applies an electrical potential to the sensor electrode for a charging process and a ground potential to the reference sensor electrode for a discharging process. The control unit detects a period of time until a minimum threshold for the electrical potential for the sensor electrode and the reference sensor electrode is reached. A difference between the period of times detected for the sensor and reference sensor electrodes is determined. An imminent trapping event is detected if the difference exceeds a predefined threshold and the period of time detected for the sensor electrode deviates from a predefined standard period of time or a standard period of time detected in a state detected without an imminent trapping event.

Abstract: The present invention pertains to methods and kits for isolating extracellular nucleic acids from a biological sample using anion exchange particles. It was found that incorporating into the binding mixture a polyoxyalkylene fatty alcohol ether compensates performance variations that are attributable to differences in the anion exchange surface as they may occur e.g. between different lots/batches of the anion exchange particles and/or during storage of said particles. Moreover, including a polyoxyalkylene fatty alcohol ether in the binding mixture resulted in a higher purity of the obtained eluates revealing significantly less inhibition in a downstream reaction such as a PCR reaction.

Abstract: The present invention pertains to methods and kits for isolating extracellular nucleic acids from a biological sample using anion exchange particles. It was found that incorporating into the binding mixture a polyoxyalkylene fatty alcohol ether compensates performance variations that are attributable to differences in the anion exchange surface as they may occur e.g. between different lots/batches of the anion exchange particles and/or during storage of said particles. Moreover, including a polyoxyalkylene fatty alcohol ether in the binding mixture resulted in a higher purity of the obtained eluates revealing significantly less inhibition in a downstream reaction such as a PCR reaction.

Abstract: A mirror for a head-up display, in particular for a head-up display for transportation is disclosed. A head-up display comprising such a mirror is also disclosed. The mirror has a base body with a planar region and a rib arranged at a periphery of the planar region. A mirror layer is arranged on the planar region wherein the rib has an anti-reflective structure.

Abstract: A device for detecting a trapping event of a motor-actuatable closing system of a vehicle includes sensor and reference sensor electrodes at least partially surrounding the edge of a vehicle opening closable by a closure element. A control unit applies an electrical potential to the sensor electrode for a charging process and a ground potential to the reference sensor electrode for a discharging process. The control unit detects a period of time until a minimum threshold for the electrical potential for the sensor electrode and the reference sensor electrode is reached. A difference between the period of times detected for the sensor and reference sensor electrodes is determined. An imminent trapping event is detected if the difference exceeds a predefined threshold and the period of time detected for the sensor electrode deviates from a predefined standard period of time or a standard period of time detected in a state detected without an imminent trapping event.

Abstract: Methods for characterizing the surface shapes of optical elements include the following steps: carrying out, in an interferometric test arrangement, at least a first interferogram measurement on the optical element by superimposing a test wave, which has been generated by diffraction of electromagnetic radiation on a diffractive element and has been reflected at the optical element, carrying out at least one additional interferogram measurement on in each case one calibrating mirror for determining calibration corrections, and determining the deviation from the target shape of the optical element based on the first interferogram measurement carried out on the optical element and the determined calibration corrections. At least two interferogram measurements are carried out for the at least one calibrating mirror, which differ from one another with regard to the polarization state of the electromagnetic radiation.

Abstract: A measurement method for interferometrically measuring the shape of a surface (112) of a test object (114). A test wave (125-1, 125-2) directed at the test object has a wavefront that is at least partially adapted to the desired shape of the surface, and a reference wave (128-1, 128-2) directed at a reflective optical element (130-1, 130 2) has a propagation direction that deviates from the propagation direction of the test wave (125-1, 125-2) for each of two input waves by diffraction at a diffractive element (124). For each wavelength, the test wave is superimposed after interaction with the test object with the associated reference wave after the back-reflection at the first reflective optical element. The test and reference waves are diffracted again at the diffractive element for superposition. An interferogram produced by the superposition is captured in a capture plane (148-1, 148-2). The interferograms are jointly evaluated.

Abstract: A device for generating a virtual image comprising a display element for generating an image, an optical waveguide for widening an exit pupil, and an anti-glare element arranged downstream of the optical waveguide in a beam path wherein the anti-glare element is a shutter is disclosed. A method and a head-up display comprising a device for generating a virtual image are also disclosed.

Abstract: A facet assembly is a constituent part of a facet mirror for an illumination optical unit for projection lithography. The facet assembly has a facet with a reflection surface for reflecting illumination light. A facet main body of the facet assembly has at least one hollow chamber. A reflection surface chamber wall of the hollow chamber forms at least one portion of the reflection surface. An actuator control apparatus of the facet assembly is operatively connected to the hollow chamber for the controlled deformation of the reflection surface chamber wall. The result is a facet assembly that is usable flexibly as a constituent part of a facet mirror equipped therewith within an illumination optical unit for projection lithography.

Abstract: A measurement method for interferometrically measuring the shape of a surface (112) of a test object (114). A test wave (125-1, 125-2) directed at the test object has a wavefront that is at least partially adapted to the desired shape of the surface, and a reference wave (128-1, 128-2) directed at a reflective optical element (130-1, 130 2) has a propagation direction that deviates from the propagation direction of the test wave (125-1, 125-2) for each of two input waves by diffraction at a diffractive element (124). For each wavelength, the test wave is superimposed after interaction with the test object with the associated reference wave after the back-reflection at the first reflective optical element. The test and reference waves are diffracted again at the diffractive element for superposition. An interferogram produced by the superposition is captured in a capture plane (148-1, 148-2). The interferograms are jointly evaluated.

Abstract: A projection exposure apparatus for semiconductor lithography includes a mirror and a temperature-regulating device for regulating temperature on the basis of radiation. The mirror includes at least one cutout. The temperature-regulating device includes a temperature-regulating body arranged without contact in the cutout of the mirror. The temperature-regulating body has a cavity. A fluid for temperature regulation of the temperature-regulating body is present in the cavity.

Abstract: Methods for characterizing the surface shapes of optical elements include the following steps: carrying out, in an interferometric test arrangement, at least a first interferogram measurement on the optical element by superimposing a test wave, which has been generated by diffraction of electromagnetic radiation on a diffractive element and has been reflected at the optical element, carrying out at least one additional interferogram measurement on in each case one calibrating mirror for determining calibration corrections, and determining the deviation from the target shape of the optical element based on the first interferogram measurement carried out on the optical element and the determined calibration corrections. At least two interferogram measurements are carried out for the at least one calibrating mirror, which differ from one another with regard to the polarization state of the electromagnetic radiation.

Abstract: An assembly in an optical system, such as a microlithographic projection exposure apparatus, includes an optical element, at least one cooling channel through which can flow a cooling fluid for cooling the optical element during the operation of the optical system, and at least one corrosion detector for detecting an existing or imminent corrosion on the basis of the determination of at least one measurement variable indicating a corrosion-dictated change in state of the cooling fluid.

Abstract: The present invention pertains to methods and kits for isolating extracellular nucleic acids from a biological sample using anion exchange particles. It was found that incorporating into the binding mixture a polyoxyalkylene fatty alcohol ether compensates performance variations that are attributable to differences in the anion exchange surface as they may occur e.g. between different lots/batches of the anion exchange particles and/or during storage of said particles. Moreover, including a polyoxyalkylene fatty alcohol ether in the binding mixture resulted in a higher purity of the obtained eluates revealing significantly less inhibition in a downstream reaction such as a PCR reaction.

Abstract: A projection exposure method and apparatus are disclosed for exposing a radiation-sensitive substrate with at least one image of a pattern of a mask under the control of an operating control system of a projection exposure apparatus, part of the pattern lying in an illumination region is imaged onto the image field on the substrate with the aid of a projection lens, wherein all rays of the projection radiation contributing to the image generation in the image field form a projection beam path.

Abstract: An imaging optical unit includes a plurality of mirrors to guide imaging light along an imaging beam path. The plurality of mirrors includes a number of mirrors for grazing incidence (GI mirrors), which deflect a chief ray of a central object field point with an angle of incidence of more than 45°. At least two of the GI mirrors are in the imaging beam path as basic GI mirrors so that the deflection effect thereof adds up for the chief ray. At least one further GI mirror is arranged in the imaging beam path as a counter GI mirror so that the deflection effect thereof acts in subtractive fashion for the chief ray in relation to the deflection effect of the basic GI mirrors. This can yield an imaging optical unit having enhanced flexibility in relation to an installation space used for mirror bodies of the mirrors of the imaging optical unit.