Abstract: A method for manufacturing a sensor, the sensor including a three-dimensional interdigital electrode arrangement positioned on a substrate, comprising applying a temperature sensing resistor onto the substrate by sputtering a first adhesion layer and a first metallic layer onto the substrate, applying a first resist layer to the first metallic layer, applying and structuring a first resist material on the first metallic layer, and after structuring, etching the first metallic layer in resist free areas; and applying a three-dimensional interdigital electrode arrangement onto the substrate by sputtering a second adhesion layer and a second metallic layer onto the substrate, applying and structuring a second resist material only to second metal layer, after the structuring, etching the second metallic layer in resist free areas to form valleys, and after etching the second metallic layer, applying an electroplating layer.

Abstract: Micromechanical component and a method for its production having vertically arranged layers made of metallic materials, with the layers adhering firmly to one another at least in part. The layers of the micromechanical component are attached to each other via intermediate layers, with the intermediate layers being at least one sputtered layer which can be applied in the form of a metallic start plating to the underlying layer, which includes metallic and nonmetallic areas, and to which an upper metallic electroplated layer can be applied. Upon their completion, the layers yield the micromechanical component with layers that adhere to one another or layers which can be partially detached from one another.

Abstract: The microvalve includes an electromagnetic drive and of a multilayer lower valve part, which are permanently bonded to one another and are manufactured separately from one another. The lower valve part includes at least one armature and a valve-closure element, which are axially movable, as well as a housing which at least partially surrounds this axially movable component of the microvalve. The layers of the lower valve part are built up one upon the other by means of (multilayer) electrodeposition.The microvalve can be used in fuel-injection systems of internal combustion engines.

Abstract: The microvalve according to the invention is comprised of an electromagnetic drive and of a multilayer lower valve part, which are permanently bonded to one another and are manufactured separately from one another. The lower valve part includes at least one armature and a valve-closure element, which are axially movable, as well as a housing which at least partially surrounds this axially movable component of the microvalve. The layers of the lower valve part are built up one upon the other by means of (multilayer) electrodeposition. The microvalve can be used in fuel-injection systems of internal combustion engines.