Patents by Inventor Alexandre Chibko

Alexandre Chibko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9653536
    Abstract: A method for fabricating a structure comprising, in succession, a support substrate, a dielectric layer, an active layer, a separator layer of polycrystalline silicon, comprising the steps of: a) providing a donor substrate, b) forming an embrittlement area in the donor substrate, c) providing the support structure, d) forming the separator layer on the support substrate, e) forming the dielectric layer, f) assembling the donor substrate and the support substrate, g) fracturing the donor substrate along the embrittlement area, h) subjecting the structure to a strengthening annealing of at least 10 minutes, the fabrication method being noteworthy in that step d) is executed in such a way that the polycrystalline silicon of the separator layer exhibits an entirely random grain orientation, and in that the strengthening annealing is executed at a temperature strictly greater than 950° C. and less than 1200° C.
    Type: Grant
    Filed: December 2, 2013
    Date of Patent: May 16, 2017
    Assignee: Soitec
    Inventors: Alexandre Chibko, Isabelle Bertrand, Sylvain Peru, Sothachett Van, Patrick Reynaud
  • Publication number: 20150303247
    Abstract: This method for fabricating a structure comprising, in succession, a support substrate, a dielectric layer, an active layer, a separator layer of polycrystalline silicon, comprising the steps of: a) providing a donor substrate, b) forming an embrittlement area in the donor substrate, c) providing the support structure, d) forming the separator layer on the support substrate, e) forming the dielectric layer, f) assembling the donor substrate and the support substrate, g) fracturing the donor substrate along the embrittlement area, h) subjecting the structure to a strengthening annealing of at least 10 minutes, the fabrication method being noteworthy in that step d) is executed in such a way that the polycrystalline silicon of the separator layer exhibits an entirely random grain orientation, and in that the strengthening annealing is executed at a temperature strictly greater than 950° C. and less than 1200° C.
    Type: Application
    Filed: December 2, 2013
    Publication date: October 22, 2015
    Inventors: Alexandre Chibko, Isabelle Bertrand, Sylvain Peru, Sothachett Van, Patrick Reynaud
  • Patent number: 8617962
    Abstract: The invention relates to finishing a substrate of the semiconductor-on-insulator (SeOI) type comprising an insulator layer buried between two semiconducting material layers. The method successively comprises routing the annular periphery of the substrate so as to obtain a routed substrate, and encapsulating the routed substrate so as to cover the routed side edge of the buried insulator layer by means of a semiconducting material.
    Type: Grant
    Filed: March 14, 2011
    Date of Patent: December 31, 2013
    Assignee: Soitec
    Inventors: Walter Schwarzenbach, Aziz Alami-Idrissi, Alexandre Chibko, Sebastien Kerdiles
  • Patent number: 8357587
    Abstract: The invention relates to a method for routing a chamfered substrate, having applications in the field of electronics, optics, or optoelectronics, which involves depositing a layer of a protective material on a peripheral annular zone of the substrate preferably with the aid of a plasma, partially etching the protective material with the aid of a plasma, so as to preserve a protective ring of the deposited material on the front face of the substrate, this ring located at a distance from the edge of the substrate, so as to delimit an accessible peripheral annular zone, etching a thickness of the material constituting the substrate to be routed, preferably with the aid of a plasma that is level with the accessible peripheral annular zone of the substrate, and removing the ring of protective material preferably with the aid of a plasma.
    Type: Grant
    Filed: December 10, 2010
    Date of Patent: January 22, 2013
    Assignee: Soitec
    Inventors: Walter Schwarzenbach, Aziz Alami-Idrissi, Alexandre Chibko, Sébastien Kerdiles
  • Publication number: 20130005122
    Abstract: The invention relates to finishing a substrate of the semiconductor-on-insulator (SeOI) type comprising an insulator layer buried between two semiconducting material layers. The method successively comprises: routing the annular periphery of the substrate so as to obtain a routed substrate, and encapsulating the routed substrate so as to cover the routed side edge of the buried insulator layer by means of a semiconducting material.
    Type: Application
    Filed: March 14, 2011
    Publication date: January 3, 2013
    Applicant: SOITEC
    Inventors: Walter Schwarzenbach, Aziz Alami-Idrissi, Alexandre Chibko, Sebastien Kerdiles
  • Publication number: 20110140244
    Abstract: The invention relates to a method for routing a chamfered substrate, having applications in the field of electronics, optics, or optoelectronics, which involves depositing a layer of a protective material on a peripheral annular zone of the substrate preferably with the aid of a plasma, partially etching the protective material with the aid of a plasma, so as to preserve a protective ring of the deposited material on the front face of the substrate, this ring located at a distance from the edge of the substrate, so as to delimit an accessible peripheral annular zone, etching a thickness of the material constituting the substrate to be routed, preferably with the aid of a plasma that is level with the accessible peripheral annular zone of the substrate, and removing the ring of protective material preferably with the aid of a plasma.
    Type: Application
    Filed: December 10, 2010
    Publication date: June 16, 2011
    Inventors: Walter Schwarzenbach, Aziz Alami-Idrissi, Alexandre Chibko, Sébastien Kerdiles