Patents by Inventor ALEXANDRE DE CHAMBIRIER

ALEXANDRE DE CHAMBIRIER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • RADIO FREQUENCY MATCH NETWORK AND GENERATOR
    Publication number: 20210225614
    Abstract: A method of providing data on radio frequency pulses in a radio frequency plasma processing system, the method including measuring an electrical parameter within a matching network of the radio frequency plasma processing system; determining an attribute of the measurement of the electrical parameter; defining a first statistic for the attribute of the measurement of the electrical parameter; defining a second statistic based on the first statistic for at least one of a phase and a process; delivering the first statistic and second statistic to a user; and storing the first statistic and the second statistic within the matching network.
    Type: Application
    Filed: January 19, 2021
    Publication date: July 22, 2021
    Inventor: ALEXANDRE DE CHAMBIRIER