Patents by Inventor Alexandre Kodentsov

Alexandre Kodentsov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Spectral purity filter
    Patent number: 9007565
    Abstract: A spectral purity filter includes a body of material, through which a plurality of apertures extend. The apertures are arranged to suppress radiation having a first wavelength and to allow at least a portion of radiation having a second wavelength to be transmitted through the apertures. The second wavelength of radiation is shorter than the first wavelength of radiation. The body of material is formed from tungsten-molybdenum alloy or a molybdenum-rhenium alloy or a tungsten-rhenium alloy or a tungsten-molybdenum-rhenium alloy.
    Type: Grant
    Filed: December 8, 2010
    Date of Patent: April 14, 2015
    Assignee: ASML Netherlands B.V.
    Inventors: Andrei Mikhailovich Yakunin, Vladimir Mihailovitch Krivtsun, Viacheslav Medvedev, Alexandre Kodentsov
  • SPECTRAL PURITY FILTER
    Publication number: 20120307224
    Abstract: A spectral purity filter includes a body of material, through which a plurality of apertures extend. The apertures are arranged to suppress radiation having a first wavelength and to allow at least a portion of radiation having a second wavelength to be transmitted through the apertures. The second wavelength of radiation is shorter than the first wavelength of radiation. The body of material is formed from tungsten-molybdenum alloy or a molybdenum-rhenium alloy or a tungsten-rhenium alloy or a tungsten-molybdenum-rhenium alloy.
    Type: Application
    Filed: December 8, 2010
    Publication date: December 6, 2012
    Applicant: ASML Netherlands B.V.
    Inventors: Andrei Mikhailovich Yakunin, Vladimir Mihailovitch Krivtsun, Viacheslav Medvedev, Alexandre Kodentsov