Patents by Inventor Alexei V. Smirnov

Alexei V. Smirnov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10534375
    Abstract: Mass flow control systems and methods for controlling the mass flow rate of a gas through a primary conduit are disclosed. One mass flow control system includes a primary conduit for directing a flow of a gas and an adjustment system configured to divert a portion of the gas from the primary conduit to a secondary conduit and provide an adjustment signal that changes when a composition of the gas changes. A mass flow controller is operatively coupled to the primary conduit to control a primary flow rate of the gas. The mass flow controller includes a valve to control the primary flow rate of the gas and a control loop configured to receive the adjustment signal and control the valve to provide the primary flow rate of the gas at a set point.
    Type: Grant
    Filed: August 9, 2018
    Date of Patent: January 14, 2020
    Assignee: Hitachi Metals, Ltd.
    Inventors: Ryan Johnson, Alexei V. Smirnov, Patrick Albright, Cy Jordan, Arun Nagarajan
  • Patent number: 10533982
    Abstract: Systems and method for detecting a concentration of a gas in a gas stream are disclosed. A method includes receiving a gas stream including a carrier gas and a processing gas. Bridge signals of a mass flow sensor are used to produce a processing-gas concentration signal and a gas-stream mass flow rate signal. The gas stream is controlled so a mass flow rate of the processing gas equals a processing-gas-setpoint signal. In some variations, the processing-gas-concentration signal is produced using an upstream temperature of the gas stream and a bridge-derived temperature.
    Type: Grant
    Filed: May 15, 2019
    Date of Patent: January 14, 2020
    Assignee: HITACHI METALS, LTD.
    Inventors: Patrick Albright, Ryan Johnson, Alexei V. Smirnov
  • Publication number: 20190361468
    Abstract: A multi-chamber rate-of-change flow meter system and methods for operating the same are disclosed. The multi-chamber rate-of-change flow meter system includes a collection of N chambers, means for drawing a gas into or out of the collection of N chambers, N pressure sensors corresponding one of the N chambers, and means for redistributing the gas among the chambers. A measurement module is coupled to the pressure sensors to obtain a rate of change of pressure in each of the chambers due to the redistribution of the gas and calculate a flow rate of the gas flowing into or out of the collection of N chambers based upon the rate of change of pressure in each of the chambers.
    Type: Application
    Filed: April 26, 2019
    Publication date: November 28, 2019
    Inventor: Alexei V. Smirnov
  • Patent number: 10473500
    Abstract: A mass flow controller and associated methods for providing indicated flow from the mass flow controller are disclosed. The method may include obtaining a measured flow signal indicative of a mass flow rate of a fluid that is controlled by the mass flow controller and filtering the measured flow signal to generate indicated flow that provides a representation of the actual mass flow rate of the fluid. The indicated flow is provided to an operator of the mass flow controller, and a rate of change of the mass flow rate of the fluid is determined based upon samples of the measured flow signal. A time constant used in connection with the filtering is then adjusted based upon the rate of change of the mass flow rate.
    Type: Grant
    Filed: January 20, 2014
    Date of Patent: November 12, 2019
    Assignee: Hitachi Metals, Ltd.
    Inventor: Alexei V. Smirnov
  • Publication number: 20190331515
    Abstract: Mass flow controllers and methods for controlling mass flow controllers are disclosed. A method includes providing a gas through a thermal mass flow sensor of the mass flow controller and processing a flow sensor signal from the thermal mass flow sensor of the mass flow controller to produce a measured flow signal. The measured flow signal is corrected to produce a corrected flow signal by gradually applying non-linearity correction to the measured flow signal when a flow rate of the gas changes. A valve of the mass flow controller is controlled using the corrected flow signal and a setpoint signal.
    Type: Application
    Filed: April 3, 2019
    Publication date: October 31, 2019
    Inventor: Alexei V. Smirnov
  • Publication number: 20190265218
    Abstract: Systems and method for detecting a concentration of a gas in a gas stream are disclosed. A method includes receiving a gas stream including a carrier gas and a processing gas. Bridge signals of a mass flow sensor are used to produce a processing-gas concentration signal and a gas-stream mass flow rate signal. The gas stream is controlled so a mass flow rate of the processing gas equals a processing-gas-setpoint signal. In some variations, the processing-gas-concentration signal is produced using an upstream temperature of the gas stream and a bridge-derived temperature.
    Type: Application
    Filed: May 15, 2019
    Publication date: August 29, 2019
    Inventors: Patrick Albright, Ryan Johnson, Alexei V. Smirnov
  • Patent number: 10295518
    Abstract: Systems and method for detecting a concentration of a gas in a gas stream are disclosed. A method includes receiving a gas stream including a carrier gas and a processing gas. Bridge voltages of a mass flow sensor are used to produce a processing-gas concentration signal and a gas-stream mass flow rate signal. The gas stream is controlled so a mass flow rate of the processing gas equals a processing-gas-setpoint signal. In some variations, the processing-gas-concentration signal is produced using an upstream temperature of the gas stream and a bridge-derived temperature. In other variations, the processing-gas-concentration signal is produced using a top voltage of the mass flow sensor and the gas-stream mass flow rate signal.
    Type: Grant
    Filed: December 14, 2016
    Date of Patent: May 21, 2019
    Assignee: Hitachi Metals, Ltd.
    Inventors: Patrick Albright, Ryan Johnson, Alexei V. Smirnov
  • Publication number: 20180348798
    Abstract: Mass flow control systems and methods for controlling the mass flow rate of a gas through a primary conduit are disclosed. One mass flow control system includes a primary conduit for directing a flow of a gas and an adjustment system configured to divert a portion of the gas from the primary conduit to a secondary conduit and provide an adjustment signal that changes when a composition of the gas changes. A mass flow controller is operatively coupled to the primary conduit to control a primary flow rate of the gas. The mass flow controller includes a valve to control the primary flow rate of the gas and a control loop configured to receive the adjustment signal and control the valve to provide the primary flow rate of the gas at a set point.
    Type: Application
    Filed: August 9, 2018
    Publication date: December 6, 2018
    Inventors: Ryan Johnson, Alexei V. Smirnov, Patrick Albright, Cy Jordan, Arun Nagarajan
  • Patent number: 10126761
    Abstract: Gas insensitive systems and methods for controlling the mass flow rate of a gas through a primary conduit are disclosed. The method includes producing, in a secondary conduit, an assessment flow that has a changing pressure; calculating a first measure of a flow rate of the assessment flow based upon a rate-of-change of the pressure of the assessment flow; and measuring the assessment flow with a mass flow meter that is affected by the composition of the gas to produce a second measure of the assessment flow. An adjustment signal is generated based upon a difference between the first measure and the second measure, and a gas-corrected flow signal is generated by adjusting a measured-flow signal of a mass flow controller with the adjustment signal. The gas-corrected flow signal is used by the mass flow controller to control a flow rate of the gas through the primary conduit.
    Type: Grant
    Filed: December 21, 2016
    Date of Patent: November 13, 2018
    Assignee: Hitachi Metals, Ltd.
    Inventors: Ryan Johnson, Alexei V. Smirnov, Patrick Albright, Cy Jordan, Arun Nagarajan
  • Patent number: 10041825
    Abstract: Mass flow controllers with on-tool diagnostic capabilities and methods for on-tool diagnostics are disclosed. A mass flow controller includes a differential voltage processing component to provide a first output that is indicative of a differential voltage between second and fourth nodes of a bridge circuit and a top voltage processing component provides a second output indicative of a top voltage between the first node and the third node of the bridge circuit. Top-and-differential voltage reference data stored in non-volatile memory defines a characteristic curve relating top voltage reference values to corresponding differential voltage reference values. A sensor analysis component obtains a top and differential voltage pair and assesses whether the top and differential voltage pair deviates from the characteristic curve to determine whether the sensing element circuit has changed since the top-and-differential voltage reference data was stored in the non-volatile memory.
    Type: Grant
    Filed: December 15, 2017
    Date of Patent: August 7, 2018
    Assignee: HITACHI METALS, LTD.
    Inventors: Alexei V. Smirnov, Patrick Albright
  • Publication number: 20180106658
    Abstract: Mass flow controllers with on-tool diagnostic capabilities and methods for on-tool diagnostics are disclosed. A mass flow controller includes a differential voltage processing component to provide a first output that is indicative of a differential voltage between second and fourth nodes of a bridge circuit and a top voltage processing component provides a second output indicative of a top voltage between the first node and the third node of the bridge circuit. Top-and-differential voltage reference data stored in non-volatile memory defines a characteristic curve relating top voltage reference values to corresponding differential voltage reference values. A sensor analysis component obtains a top and differential voltage pair and assesses whether the top and differential voltage pair deviates from the characteristic curve to determine whether the sensing element circuit has changed since the top-and-differential voltage reference data was stored in the non-volatile memory.
    Type: Application
    Filed: December 15, 2017
    Publication date: April 19, 2018
    Inventors: Alexei V. Smirnov, Patrick Albright
  • Patent number: 9898013
    Abstract: Mass flow controllers and methods for improving the control of a flow of a variety of fluid types are described. The method includes selecting a process gas type for the process gas that will be controlled and obtaining molecular mass information for the selected processed gas type. General characterization data is obtained that includes, for each of a plurality of flow and pressure value pairs, a corresponding control signal value and operating characterization data is generated by modifying the flow values in the general characterization data based upon the molecular mass for the selected process gas type. The operating characterization data is then used to operate a valve of the mass flow controller in open loop control mode.
    Type: Grant
    Filed: August 27, 2015
    Date of Patent: February 20, 2018
    Assignee: Hitachi Metals, Ltd.
    Inventor: Alexei V. Smirnov
  • Patent number: 9846073
    Abstract: Mass flow controllers with on-tool diagnostic capabilities and methods for on-tool diagnosis of mass flow controllers are disclosed herein. One method includes opening a control valve to a fixed position and closing an upstream valve to produce a flow rate that decreases from a high flow rate, across a range of flow rates, to a low flow rate. A pressure signal is generated that is indicative of a pressure of the fluid within a volume between the upstream valve and a sensor tube, and a flow sensor signal is provided with the mass flow sensor that is indicative of a mass flow rate of the fluid through the main flow path. Ratio curves are produced that relate, across the range of flow rates, a rate of change of the pressure signal to the flow sensor signal and comparing a test ratio curve to a previously generated baseline ratio curve.
    Type: Grant
    Filed: March 15, 2017
    Date of Patent: December 19, 2017
    Assignee: Hitachi Metals, Ltd.
    Inventors: Alexei V. Smirnov, Arun Nagarajan
  • Patent number: 9766635
    Abstract: A mass flow controller and method for operating the same is disclosed. The mass flow controller includes a mass flow control system to control the mass flow rate of a fluid, and a data logging component that obtains snapshots of condition-specific-data for each of a plurality of reoccurring condition types, and reduces each snapshot of condition-specific-data to functional parameter values that characterize each snapshot of condition-specific-data, and the data logging component generates statistical values that are stored in a short term data store that characterize multiple functional parameter values that are obtained during each separate occurrence of a specific condition type. A diagnostics component diagnoses failures using current functional parameter values and the statistical values stored in the short-term memory, and a prognostics component predicts failures based upon a collection of data sets that are stored in the long-term memory.
    Type: Grant
    Filed: January 26, 2016
    Date of Patent: September 19, 2017
    Assignee: HITACHI METALS, LTD.
    Inventors: Alexei V. Smirnov, Patrick Albright, Cy Jordan, Arun Nagarajan, Michael J. Zolock, Ryan Johnson, Alexander Fernandez
  • Publication number: 20170184441
    Abstract: Mass flow controllers with on-tool diagnostic capabilities and methods for on-tool diagnosis of mass flow controllers are disclosed herein. One method includes opening a control valve to a fixed position and closing an upstream valve to produce a flow rate that decreases from a high flow rate, across a range of flow rates, to a low flow rate. A pressure signal is generated that is indicative of a pressure of the fluid within a volume between the upstream valve and a sensor tube, and a flow sensor signal is provided with the mass flow sensor that is indicative of a mass flow rate of the fluid through the main flow path. Ratio curves are produced that relate, across the range of flow rates, a rate of change of the pressure signal to the flow sensor signal and comparing a test ratio curve to a previously generated baseline ratio curve.
    Type: Application
    Filed: March 15, 2017
    Publication date: June 29, 2017
    Inventors: Alexei V. Smirnov, Arun Nagarajan
  • Publication number: 20170185091
    Abstract: Gas insensitive systems and methods for controlling the mass flow rate of a gas through a primary conduit are disclosed. The method includes producing, in a secondary conduit, an assessment flow that has a changing pressure; calculating a first measure of a flow rate of the assessment flow based upon a rate-of-change of the pressure of the assessment flow; and measuring the assessment flow with a mass flow meter that is affected by the composition of the gas to produce a second measure of the assessment flow. An adjustment signal is generated based upon a difference between the first measure and the second measure, and a gas-corrected flow signal is generated by adjusting a measured-flow signal of a mass flow controller with the adjustment signal. The gas-corrected flow signal is used by the mass flow controller to control a flow rate of the gas through the primary conduit.
    Type: Application
    Filed: December 21, 2016
    Publication date: June 29, 2017
    Inventors: Ryan Johnson, Alexei V. Smirnov, Patrick Albright, Cy Jordan, Arun Nagarajan
  • Publication number: 20170168035
    Abstract: Systems and method for detecting a concentration of a gas in a gas stream are disclosed. A method includes receiving a gas stream including a carrier gas and a processing gas. Bridge voltages of a mass flow sensor are used to produce a processing-gas concentration signal and a gas-stream mass flow rate signal. The gas stream is controlled so a mass flow rate of the processing gas equals a processing-gas-setpoint signal. In some variations, the processing-gas-concentration signal is produced using an upstream temperature of the gas stream and a bridge-derived temperature. In other variations, the processing-gas-concentration signal is produced using a top voltage of the mass flow sensor and the gas-stream mass flow rate signal.
    Type: Application
    Filed: December 14, 2016
    Publication date: June 15, 2017
    Inventors: Patrick Albright, Ryan Johnson, Alexei V. Smirnov
  • Publication number: 20170118807
    Abstract: An apparatus includes a chamber configured to support a number of quasi-orthogonal resonant modes, and at least one antenna assembly, where the antenna assembly includes an antenna having a radiating element, where (i) the antenna has predominantly linear polarization of radiation defined by a polarization plane, (ii) the radiating element is disposed within the chamber such that the polarization plane is not parallel and not perpendicular to the plane containing a primary axis of the chamber and a central point of the radiating element, and (iii) each antenna is coupled to the chamber through a designated surface of the chamber and coupled to a source of microwave or radio frequency energy external to the chamber having a nominal operating frequency.
    Type: Application
    Filed: December 12, 2016
    Publication date: April 27, 2017
    Applicant: Upscale Holdings, Inc.
    Inventors: Valerie S. Zhylkov, James H. Brownell, Stanislav Zhilkov, Alexei V. Smirnov
  • Patent number: 9605992
    Abstract: Mass flow controllers with on-tool diagnostic capabilities and methods for on-tool diagnosis of mass flow controllers are disclosed herein. One disclosed method includes effectuating a particular modification to the heating of the one or more heating-sensing elements, and monitoring one or more outputs of the mass flow sensor to obtain present data that characterizes a present operation of the mass flow sensor in response to the particular modification to the heating. Reference data is obtained that characterizes prior operation of the mass flow sensor, and the present operation of the mass flow sensor is compared to the prior operation of the mass flow sensor to assess whether the operation of the mass flow sensor changed over time.
    Type: Grant
    Filed: July 1, 2014
    Date of Patent: March 28, 2017
    Assignee: Hitachi Metals, Ltd.
    Inventors: Alexei V. Smirnov, Arun Nagarajan
  • Patent number: 9560699
    Abstract: An apparatus includes a chamber configured to support a number of quasi-orthogonal resonant modes, and at least one antenna assembly, where the antenna assembly includes an antenna having a radiating element, where (i) the antenna has predominantly linear polarization of radiation defined by a polarization plane, (ii) the radiating element is disposed within the chamber such that the polarization plane is not parallel and not perpendicular to the plane containing a primary axis of the chamber and a central point of the radiating element, and (iii) each antenna is coupled to the chamber through a designated surface of the chamber and coupled to a source of microwave or radio frequency energy external to the chamber having a nominal operating frequency.
    Type: Grant
    Filed: April 8, 2010
    Date of Patent: January 31, 2017
    Assignee: Upscale Holdings, Inc.
    Inventors: Valerie S. Zhylkov, James H. Brownell, Stanislav Zhilkov, Alexei V. Smirnov