Patents by Inventor Alexey Kuritsyn
Alexey Kuritsyn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230112975Abstract: Provided herein are systems, devices, and methods for improved optical waveguide transmission and alignment in an analytical system. Waveguides in optical analytical systems can exhibit variable and increasing back reflection of single-wavelength illumination over time, thus limiting their effectiveness and reliability. The systems are also subject to optical interference under conditions that have been used to overcome the back reflection. Novel systems and approaches using broadband illumination light with multiple longitudinal modes have been developed to improve optical transmission and analysis in these systems. Novel systems and approaches for the alignment of a target waveguide device and an optical source are also disclosed.Type: ApplicationFiled: August 15, 2022Publication date: April 13, 2023Applicant: Pacific Biosciences of California, Inc.Inventors: Alexey KURITSYN, Mark MCDONALD, Aaron RULISON, Russell BERMAN
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Patent number: 11415745Abstract: Provided herein are systems, devices, and methods for improved optical waveguide transmission and alignment in an analytical system. Waveguides in optical analytical systems can exhibit variable and increasing back reflection of single-wavelength illumination over time, thus limiting their effectiveness and reliability. The systems are also subject to optical interference under conditions that have been used to overcome the back reflection. Novel systems and approaches using broadband illumination light with multiple longitudinal modes have been developed to improve optical transmission and analysis in these systems. Novel systems and approaches for the alignment of a target waveguide device and an optical source are also disclosed.Type: GrantFiled: March 15, 2021Date of Patent: August 16, 2022Assignee: Pacific Biosciences of California, Inc.Inventors: Alexey Kuritsyn, Mark Mcdonald, Aaron Rulison, Russell Berman
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Patent number: 11419202Abstract: The present disclosure is directed to laser produced plasma light sources having a target material, such as xenon, that is coated on the outer surface of a drum. Bearing systems rotate the drum that have structures for reducing leakage of contaminant material and/or bearing gas into the LPP chamber. Injection systems are disclosed for coating and replenishing target material on the drum. Wiper systems are disclosed for preparing the target material surface on the drum, e.g. smoothing the target material surface. Systems for cooling and maintaining the temperature of the drum and a housing overlying the drum are also disclosed.Type: GrantFiled: January 11, 2021Date of Patent: August 16, 2022Assignee: KLA CorporationInventors: Alexey Kuritsyn, Brian Ahr, Rudy F. Garcia, Frank Chilese, Oleg Khodykin
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Publication number: 20210311254Abstract: Provided herein are systems, devices, and methods for improved optical waveguide transmission and alignment in an analytical system. Waveguides in optical analytical systems can exhibit variable and increasing back reflection of single-wavelength illumination over time, thus limiting their effectiveness and reliability. The systems are also subject to optical interference under conditions that have been used to overcome the back reflection. Novel systems and approaches using broadband illumination light with multiple longitudinal modes have been developed to improve optical transmission and analysis in these systems. Novel systems and approaches for the alignment of a target waveguide device and an optical source are also disclosed.Type: ApplicationFiled: March 15, 2021Publication date: October 7, 2021Applicant: Pacific Biosciences of California, Inc.Inventors: Alexey KURITSYN, Mark MCDONALD, Aaron RULISON, Russell BERMAN
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Publication number: 20210285881Abstract: Provided herein are highly multiplexed optical analytical systems for improved nucleic acid sequencing. The systems include a plurality of highly multiplexed optical chips, at least one optical source, and a plurality of optical delivery devices for illuminating an array of nanoscale rection regions on each of the optical chips. In use, the reaction regions contain fluorescent nucleic acid sequencing reagents and are arranged to report nucleic acid sequence information to optical detectors associated with the multiplexed optical chips in real time. The systems enable a massive increase in the scale of nucleic acid sequencing reactions capable of being performed within a single instrument without a corresponding increase in size, complexity, or cost of the instrument.Type: ApplicationFiled: February 18, 2021Publication date: September 16, 2021Inventors: Alexey KURITSYN, Mark MCDONALD, Aaron RULISON, Annette GROT
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Publication number: 20210136903Abstract: The present disclosure is directed to laser produced plasma light sources having a target material, such as xenon, that is coated on the outer surface of a drum. Bearing systems rotate the drum that have structures for reducing leakage of contaminant material and/or bearing gas into the LPP chamber. Injection systems are disclosed for coating and replenishing target material on the drum. Wiper systems are disclosed for preparing the target material surface on the drum, e.g. smoothing the target material surface. Systems for cooling and maintaining the temperature of the drum and a housing overlying the drum are also disclosed.Type: ApplicationFiled: January 11, 2021Publication date: May 6, 2021Applicant: KLA CORPORATIONInventors: Alexey Kuritsyn, Brian Ahr, Rudy F. Garcia, Frank Chilese, Oleg Khodykin
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Patent number: 10948652Abstract: Provided herein are systems, devices, and methods for improved optical waveguide transmission and alignment in an analytical system. Waveguides in optical analytical systems can exhibit variable and increasing back reflection of single-wavelength illumination over time, thus limiting their effectiveness and reliability. The systems are also subject to optical interference under conditions that have been used to overcome the back reflection. Novel systems and approaches using broadband illumination light with multiple longitudinal modes have been developed to improve optical transmission and analysis in these systems. Novel systems and approaches for the alignment of a target waveguide device and an optical source are also disclosed.Type: GrantFiled: November 3, 2018Date of Patent: March 16, 2021Assignee: Pacific Biosciences of California, Inc.Inventors: Alexey Kuritsyn, Mark McDonald, Aaron Rulison, Russell Berman
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Patent number: 10893599Abstract: The present disclosure is directed to laser produced plasma light sources having a target material, such as Xenon, that is coated on the outer surface of a drum. Embodiments include bearing systems for rotating the drum that have structures for reducing leakage of contaminant material and/or bearing gas into the LPP chamber. Injection systems are disclosed for coating and replenishing target material on the drum. Wiper systems are disclosed for preparing the target material surface on the drum, e.g. smoothing the target material surface. Systems for cooling and maintaining the temperature of the drum and a housing overlying the drum are also disclosed.Type: GrantFiled: July 9, 2018Date of Patent: January 12, 2021Assignee: KLA CorporationInventors: Alexey Kuritsyn, Brian Ahr, Rudy F. Garcia, Frank Chilese, Oleg Khodykin
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Publication number: 20190179078Abstract: Provided herein are systems, devices, and methods for improved optical waveguide transmission and alignment in an analytical system. Waveguides in optical analytical systems can exhibit variable and increasing back reflection of single-wavelength illumination over time, thus limiting their effectiveness and reliability. The systems are also subject to optical interference under conditions that have been used to overcome the back reflection. Novel systems and approaches using broadband illumination light with multiple longitudinal modes have been developed to improve optical transmission and analysis in these systems. Novel systems and approaches for the alignment of a target waveguide device and an optical source are also disclosed.Type: ApplicationFiled: November 3, 2018Publication date: June 13, 2019Inventors: Alexey KURITSYN, Mark MCDONALD, Aaron RULISON, Russell BERMAN
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Publication number: 20190075641Abstract: The present disclosure is directed to laser produced plasma light sources having a target material, such as Xenon, that is coated on the outer surface of a drum. Embodiments include bearing systems for rotating the drum that have structures for reducing leakage of contaminant material and/or bearing gas into the LPP chamber. Injection systems are disclosed for coating and replenishing target material on the drum. Wiper systems are disclosed for preparing the target material surface on the drum, e.g. smoothing the target material surface. Systems for cooling and maintaining the temperature of the drum and a housing overlying the drum are also disclosed.Type: ApplicationFiled: July 9, 2018Publication date: March 7, 2019Inventors: Alexey Kuritsyn, Brian Ahr, Rudy F. Garcia, Frank Chilese, Oleg Khodykin
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Patent number: 10101664Abstract: Disclosed are methods and apparatus for generating an illumination beam. In one embodiment, the apparatus includes a vacuum chamber configured to hold a target material, an optical element positioned within the vacuum chamber or within a wall of such vacuum chamber, and an illumination source system for generating at least one excitation source that is focused on the target in the vacuum chamber for generating a plasma in the vacuum chamber so as to produce illumination radiation. The apparatus further includes a debris protection system for flowing gas out of a plurality of nozzles and away from the optical element at a velocity towards the plasma so as to prevent debris from reaching such optical element.Type: GrantFiled: June 15, 2015Date of Patent: October 16, 2018Assignee: KLA-Tencor CorporationInventors: Alexey Kuritsyn, Ye Liu, Oleg Khodykin, Michael P. Kanouff
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Patent number: 10034362Abstract: The present disclosure is directed to plasma-based light sources. Systems and methods are described for protecting components of the light source from plasma generated debris which can include target material gas, atomic vapor, high energy ions, neutrals, micro-particles, and contaminants. Particular embodiments include arrangements for reducing the adverse effects of plasma generated ions and neutrals on light source components while simultaneously reducing in-band light attenuation due to target material gas and vapor.Type: GrantFiled: August 28, 2015Date of Patent: July 24, 2018Assignee: KLA-Tencor CorporationInventors: Alexey Kuritsyn, Alexander Bykanov, Michael Kanouff, Oleg Khodykin
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Patent number: 10021773Abstract: The present disclosure is directed to laser produced plasma light sources having a target material, such as Xenon, that is coated on the outer surface of a drum. Embodiments include bearing systems for rotating the drum that have structures for reducing leakage of contaminant material and/or bearing gas into the LPP chamber. Injection systems are disclosed for coating and replenishing target material on the drum. Wiper systems are disclosed for preparing the target material surface on the drum, e.g. smoothing the target material surface. Systems for cooling and maintaining the temperature of the drum and a housing overlying the drum are also disclosed.Type: GrantFiled: September 14, 2016Date of Patent: July 10, 2018Assignee: KLA-Tencor CorporationInventors: Alexey Kuritsyn, Brian Ahr, Rudy F. Garcia, Frank Chilese, Oleg Khodykin
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Patent number: 9989758Abstract: The present disclosure is directed to a system for protecting a reflective optic and/or any other surface in a plasma-based illumination system from debris by actively flowing gas against the debris flow direction. According to various embodiments, a vacuum chamber is configured to contain a target material, wherein a laser or discharge produced plasma is generated in response to an excitation of the target material. One or more outlets within the chamber are configured to receive gas flowing from a fluidically coupled gas source and further configured to actively flow the gas towards a source of debris and away from the reflective optic or any other protected surface at a controlled flow rate.Type: GrantFiled: April 7, 2014Date of Patent: June 5, 2018Assignee: KLA-Tencor CorporationInventors: Alexey Kuritsyn, Alexander Bykanov, Oleg Khodykin
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Patent number: 9918375Abstract: The present disclosure is directed to laser produced plasma light sources having a target material, such as Xenon, that is coated on the outer surface of a cylindrically-symmetric element (e.g., drum). Embodiments include a pre-pulsing arrangement which can be optimized to reduce irradiation damage to the drum and a pulse trimming unit which can be employed to reduce irradiation damage to the drum. In addition, an embodiment is disclosed wherein the surface of a cylindrically-symmetric element is formed with a plurality of grooves having a groove depth greater than 1 mm and a focusing unit focusing a laser beam and establishing an irradiation site to produce plasma from the target material, with the irradiation site distanced from a groove surface portion to protect the surface portion from irradiation damage.Type: GrantFiled: September 19, 2016Date of Patent: March 13, 2018Assignee: KLA-Tencor CorporationInventors: Alexey Kuritsyn, Ye Liu, Oleg Khodykin
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Publication number: 20170142817Abstract: The present disclosure is directed to laser produced plasma light sources having a target material, such as Xenon, that is coated on the outer surface of a drum. Embodiments include bearing systems for rotating the drum that have structures for reducing leakage of contaminant material and/or bearing gas into the LPP chamber. Injection systems are disclosed for coating and replenishing target material on the drum. Wiper systems are disclosed for preparing the target material surface on the drum, e.g. smoothing the target material surface. Systems for cooling and maintaining the temperature of the drum and a housing overlying the drum are also disclosed.Type: ApplicationFiled: September 14, 2016Publication date: May 18, 2017Inventors: Alexey Kuritsyn, Brian Ahr, Rudy F. Garcia, Frank Chilese, Oleg Khodykin
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Publication number: 20170142818Abstract: The present disclosure is directed to laser produced plasma light sources having a target material, such as Xenon, that is coated on the outer surface of a cylindrically-symmetric element (e.g., drum). Embodiments include a pre-pulsing arrangement which can be optimized to reduce irradiation damage to the drum and a pulse trimming unit which can be employed to reduce irradiation damage to the drum. In addition, an embodiment is disclosed wherein the surface of a cylindrically-symmetric element is formed with a plurality of grooves having a groove depth greater than 1 mm and a focusing unit focusing a laser beam and establishing an irradiation site to produce plasma from the target material, with the irradiation site distanced from a groove surface portion to protect the surface portion from irradiation damage.Type: ApplicationFiled: September 19, 2016Publication date: May 18, 2017Inventors: Alexey Kuritsyn, Ye Liu, Oleg Khodykin
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Publication number: 20160249442Abstract: The present disclosure is directed to plasma-based light sources. Systems and methods are described for protecting components of the light source from plasma generated debris which can include target material gas, atomic vapor, high energy ions, neutrals, micro-particles, and contaminants. Particular embodiments include arrangements for reducing the adverse effects of plasma generated ions and neutrals on light source components while simultaneously reducing in-band light attenuation due to target material gas and vapor.Type: ApplicationFiled: August 28, 2015Publication date: August 25, 2016Inventors: Alexey Kuritsyn, Alexander Bykanov, Michael Kanouff, Oleg Khodykin
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Publication number: 20160128171Abstract: Disclosed are methods and apparatus for generating an illumination beam. In one embodiment, the apparatus includes a vacuum chamber configured to hold a target material, an optical element positioned within the vacuum chamber or within a wall of such vacuum chamber, and an illumination source system for generating at least one excitation source that is focused on the target in the vacuum chamber for generating a plasma in the vacuum chamber so as to produce illumination radiation. The apparatus further includes a debris protection system for flowing gas out of a plurality of nozzles and away from the optical element at a velocity towards the plasma so as to prevent debris from reaching such optical element.Type: ApplicationFiled: June 15, 2015Publication date: May 5, 2016Applicant: KLA-Tencor CorporationInventors: Alexey Kuritsyn, Ye Liu, Oleg Khodykin, Michael P. Kanouff
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Publication number: 20140306115Abstract: The present disclosure is directed to a system for protecting a reflective optic and/or any other surface in a plasma-based illumination system from debris by actively flowing gas against the debris flow direction. According to various embodiments, a vacuum chamber is configured to contain a target material, wherein a laser or discharge produced plasma is generated in response to an excitation of the target material. One or more outlets within the chamber are configured to receive gas flowing from a fluidically coupled gas source and further configured to actively flow the gas towards a source of debris and away from the reflective optic or any other protected surface at a controlled flow rate.Type: ApplicationFiled: April 7, 2014Publication date: October 16, 2014Applicant: KLA-Tencor CorporationInventors: Alexey Kuritsyn, Alexander Bykanov, Oleg Khodykin