Patents by Inventor Alexia P. Kekoa

Alexia P. Kekoa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Film bulk acoustic resonator (FBAR) and the method of making the same
    Publication number: 20030141946
    Abstract: An apparatus having a thin film bulk acoustic resonator (FBAR) with positively sloped bottom electrode and a method of making the same is disclosed. The resonator has a bottom electrode, a top electrode, and core material. The bottom electrode includes a positively sloped edge. To make the apparatus including the resonator, first, a bottom electrode layer is deposited. Then, the bottom electrode layer is dry etched to fabricate a bottom electrode having a positively sloped edge. Next, a core layer is fabricated above the bottom electrode. Finally, a top electrode is fabricated over the core layer.
    Type: Application
    Filed: January 31, 2002
    Publication date: July 31, 2003
    Inventors: Richard C. Ruby, Teresa Volcjak, Urupattur C. Sridharan, Kuhn Seo, Allen Chien, Alexia P. Kekoa