Patents by Inventor Alexis Bavard

Alexis Bavard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11031492
    Abstract: A semiconductor structure comprising III-N materials, includes: a support substrate; a main layer of III-N material, the main layer comprising a first section disposed on the support substrate and a second section disposed on the first section; an inter-layer of III-N material, disposed between the first section and the second section in order to compress the second section of the main layer, wherein the structure's inter-layer consists of a lower layer disposed on the first section and an upper layer disposed on the lower layer and formed by a superlattice.
    Type: Grant
    Filed: March 1, 2017
    Date of Patent: June 8, 2021
    Assignee: Exagan
    Inventors: David Schenk, Alexis Bavard
  • Publication number: 20200185515
    Abstract: A semiconductor structure comprising III-N materials, includes: a support substrate; a main layer of III-N material, the main layer comprising a first section disposed on the support substrate and a second section disposed on the first section; an inter-layer of III-N material, disposed between the first section and the second section in order to compress the second section of the main layer, wherein the structure's inter-layer consists of a lower layer disposed on the first section and an upper layer disposed on the lower layer and formed by a superlattice.
    Type: Application
    Filed: March 1, 2017
    Publication date: June 11, 2020
    Inventors: David Schenk, Alexis Bavard
  • Patent number: 9923061
    Abstract: A semiconductor structure including a substrate, a buffer layer, a superlattice formed on the buffer layer, the superlattice including a pattern including n layers made of different materials, n being at least equal to 2, each layer including an AlxGayInwBzN type material where x+y+w+z=1, the thickness of each layer being less than the critical thickness thereof, the number of patterns being at least equal to 50, an insert layer wherein the material has a first lattice parameter, a layer of GaN material, wherein the lattice parameter is greater than the first lattice parameter such that the layer of GaN material is compressed by the insert layer.
    Type: Grant
    Filed: September 15, 2016
    Date of Patent: March 20, 2018
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Alexis Bavard, Matthew Charles
  • Publication number: 20170084697
    Abstract: A semiconductor structure including a substrate, a buffer layer, a superlattice formed on the buffer layer , the superlattice including a pattern including n layers made of different materials, n being at least equal to 2, each layer including an AlxGayInwBzN type material where x+y+w+z=1, the thickness of each layer being less than the critical thickness thereof, the number of patterns being at least equal to 50, an insert layer wherein the material has a first lattice parameter, a layer of GaN material, wherein the lattice parameter is greater than the first lattice parameter such that the layer of GaN material is compressed by the insert layer.
    Type: Application
    Filed: September 15, 2016
    Publication date: March 23, 2017
    Applicant: Commissariat a L'Energie Atomique et aux Energies Alternatives
    Inventors: Alexis BAVARD, Matthew CHARLES
  • Patent number: 9093271
    Abstract: The invention relates to a method for manufacturing, by means of epitaxy, a monocrystalline layer of GaN on a substrate, wherein the coefficient of thermal expansion is less than the coefficient of thermal expansion of GaN, comprising the following steps: (b) three-dimensional epitaxial growth of a layer of GaN relaxed at the epitaxial temperature, (c1) growth of an intermediate layer of BwAlxGayInzN, (c2) growth of a layer of BwAlxGayInzN, (c3) growth of an intermediate layer of BwAlxGayInzN, at least one of the layers formed in steps (c1) to (c3) being an at least ternary III-N alloy comprising aluminium and gallium, (d) growth of said layer of GaN.
    Type: Grant
    Filed: June 28, 2012
    Date of Patent: July 28, 2015
    Assignees: Soitec, Centre National de la Recherche Scientifique (CNRS)
    Inventors: David Schenk, Alexis Bavard, Yvon Cordier, Eric Frayssinet, Mark Kennard, Daniel Rondi
  • Publication number: 20140327013
    Abstract: The invention relates to a method for manufacturing, by means of epitaxy, a monocrystalline layer of GaN on a substrate, wherein the coefficient of thermal expansion is less than the coefficient of thermal expansion of GaN, comprising the following steps: (b) three-dimensional epitaxial growth of a layer of GaN relaxed at the epitaxial temperature, (c1) growth of an intermediate layer of BwAlxGayInzN, growth of a layer of BwAlxGayInzN, (c3) growth of an intermediate layer of BwAlxGayInzN, at least one of the layers formed in steps (c1) to (c3) being an at least ternary III-N alloy comprising aluminium and gallium, (d) growth of said layer of GaN.
    Type: Application
    Filed: June 28, 2012
    Publication date: November 6, 2014
    Applicants: SOITEC, OMMIC, CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)
    Inventors: David Schenk, Alexis Bavard, Yvon Cordier, Eric Frayssinet, Mark Kennard, Daniel Rondi
  • Patent number: 7655578
    Abstract: Under consideration here is a method for the production of periodic nanostructuring on one of the surfaces of a substrate (10), presenting a periodic network of dislocations, embedded within a crystalline area (4) located in the neighborhood of an interface (5) between the crystalline material surfaces of two components (1, 2) assembled by bonding to form the substrate (10). It comprises the following steps: formation, in the dislocations (3), of implants (6) made of a material other than that of the crystalline area (4); irradiation of the substrate (10) with electromagnetic waves (11) in order to cause absorption of electromagnetic energy localized in the implants (6), this absorption leading to the appearance of the periodic nanostructuring (12) on the surface of the substrate (10).
    Type: Grant
    Filed: July 3, 2007
    Date of Patent: February 2, 2010
    Assignees: Commissariat a l'Energie Atomique, Universite Jean Monnet, Centre National de la Recherche Scientifique
    Inventors: Frank Fournel, Jérôme Meziere, Alexis Bavard, Florent Pigeon, Florence Garrelie
  • Publication number: 20080280419
    Abstract: Under consideration here is a method for the production of periodic nanostructuring on one of the surfaces of a substrate (10), presenting a periodic network of dislocations, embedded within a crystalline area (4) located in the neighbourhood of an interface (5) between the crystalline material surfaces of two components (1, 2) assembled by bonding to form the substrate (10). It comprises the following steps: formation, in the dislocations (3), of implants (6) made of a material other than that of the crystalline area (4); irradiation of the sbstrate (10) with electromagnetic waves (11) in order to cause absorption of electromagnetic energy localised in the implants (6), this absorption leading to the appearance of the periodic nanostructuring (12) on the surface of the substrate (10).
    Type: Application
    Filed: July 3, 2007
    Publication date: November 13, 2008
    Applicants: COMMISSARIAT A L'ENERGIE ATOMIQUE, UNIVERSITE JEAN MONNET, CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
    Inventors: Frank Fournel, Jerome Meziere, Alexis Bavard, Florent Pigeon, Florence Garrelie