Patents by Inventor Alexius Otto Looije

Alexius Otto Looije has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithography system and method for storing positional data of a target
    Patent number: 9009631
    Abstract: The invention relates to a lithography system for patterning a target, said system comprising a feedback control system comprising an actuator for displacing the target, a measurement system for measuring a position of said target, and a control unit adapted for controlling the actuator based on the position measured by the measurement system, said feedback control system having a first latency being a maximum latency between measuring and controlling the actuator based on said measuring, a storage system for storing the measured positions, comprising a receive buffer and a storage unit with a second latency being an average latency between receiving measured positions in the receive buffer and storing said measured positions in the storage unit, wherein the first latency is at least an order of magnitude smaller than the second latency, the feedback control system comprising a unidirectional connection for transmitting said measured positions to the storage system.
    Type: Grant
    Filed: July 10, 2012
    Date of Patent: April 14, 2015
    Assignee: Mapper Lighography IP B.V.
    Inventors: Alexius Otto Looije, Michel Pieter Dansberg, Marcel Nicolaas Jacobus Van Kervinck, Guido De Boer
  • LITHOGRAPHY SYSTEM AND METHOD FOR STORING POSITIONAL DATA OF A TARGET
    Publication number: 20130016327
    Abstract: The invention relates to a lithography system for patterning a target, said system comprising a feedback control system comprising an actuator for displacing the target, a measurement system for measuring a position of said target, and a control unit adapted for controlling the actuator based on the position measured by the measurement system, said feedback control system having a first latency being a maximum latency between measuring and controlling the actuator based on said measuring, a storage system for storing the measured positions, comprising a receive buffer and a storage unit with a second latency being an average latency between receiving measured positions in the receive buffer and storing said measured positions in the storage unit, wherein the first latency is at least an order of magnitude smaller than the second latency, the feedback control system comprising a unidirectional connection for transmitting said measured positions to the storage system.
    Type: Application
    Filed: July 10, 2012
    Publication date: January 17, 2013
    Inventors: Alexius Otto Looije, Michel Pieter Dansberg, Marcel Nicolaas Jacobus Van Kervinck, Guido De Boer