Patents by Inventor Alfred A. Badowski

Alfred A. Badowski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dynamic use of process temperature
    Patent number: 6878406
    Abstract: A process for reacting a gaseous species with a substrate includes placing the substrate in a space, heating the space, introducing the gaseous species into the space, and cooling the space. Introducing the gaseous species into the space includes introducing the gaseous species into the space before the substrate reaches a steady state temperature and/or reacting the gaseous species with the substrate includes reacting the gaseous species with the substrate while cooling the space.
    Type: Grant
    Filed: April 5, 2002
    Date of Patent: April 12, 2005
    Assignee: LSI Logic Corporation
    Inventor: Alfred A. Badowski
  • Dynamic use of process temperature
    Publication number: 20030190496
    Abstract: A process for reacting a gaseous species with a substrate includes placing the substrate in a space, heating the space, introducing the gaseous species into the space, and cooling the space. Introducing the gaseous species into the space includes introducing the gaseous species into the space before the substrate reaches a steady state temperature and/or reacting the gaseous species with the substrate includes reacting the gaseous species with the substrate while cooling the space.
    Type: Application
    Filed: April 5, 2002
    Publication date: October 9, 2003
    Inventor: Alfred A. Badowski