Patents by Inventor Alfred Bergler

Alfred Bergler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for etching semiconductor wafers
    Patent number: 6046117
    Abstract: A process is taught for etching semiconductor wafers with an etching mixture comprising nitric and hydrofluoric acids and optionally a surfactant. To this mixture are added either more hydrofluoric acid, or more hydrofluoric and nitric acids, with the added acids having concentrations of at least 70% by weight. The use of concentrated acids reduces the loss of substrate material and extends etching bath life.
    Type: Grant
    Filed: May 21, 1998
    Date of Patent: April 4, 2000
    Assignee: Wacker Siltronic Gesellschaft Fur Halbleitermaterialien AG
    Inventors: Theresia Bauer, Susanne Weizbauer, Hanns Wochner, Alfred Bergler