Patents by Inventor Alfred Gatzweiler

Alfred Gatzweiler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for determining at least one optical property of an imaging optical system
    Patent number: 7760345
    Abstract: A method and an apparatus for determining at least one optical property of an imaging optical system which is designed to image an object disposed in an object plane of the optical system into an assigned image plane. The method includes disposing at least one test structure in the object plane of the optical system, disposing an image recording device in at least two different positions relative to the image plane of the optical system, in each of the at least two relative positions the image recording device being offset in relation to the image plane to such an extent that an image of the pupil of the optical system is produced respectively on the image recording device by the optical system by means of the test structure, and recording an image produced on the image recording device by the optical system by means of the test structure in each of the at least two relative positions by means of the image recording device.
    Type: Grant
    Filed: November 19, 2007
    Date of Patent: July 20, 2010
    Assignee: Carl Zeiss SMT AG
    Inventors: Matthias Manger, Markus Goeppert, Gordon Doering, Alfred Gatzweiler
  • METHOD AND APPARATUS FOR DETERMINING AT LEAST ONE OPTICAL PROPERTY OF AN IMAGING OPTICAL SYSTEM
    Publication number: 20080204729
    Abstract: A method and an apparatus for determining at least one optical property of an imaging optical system which is designed to image an object disposed in an object plane of the optical system into an assigned image plane. The method includes disposing at least one test structure in the object plane of the optical system, disposing an image recording device in at least two different positions relative to the image plane of the optical system, in each of the at least two relative positions the image recording device being offset in relation to the image plane to such an extent that an image of the pupil of the optical system is produced respectively on the image recording device by the optical system by means of the test structure, and recording an image produced on the image recording device by the optical system by means of the test structure in each of the at least two relative positions by means of the image recording device.
    Type: Application
    Filed: November 19, 2007
    Publication date: August 28, 2008
    Applicant: Carl Zeiss SMT AG
    Inventors: Matthias Manger, Markus Goeppert, Gordon Doering, Alfred Gatzweiler