Patents by Inventor Alfred J. Pierfederici

Alfred J. Pierfederici has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma etching device and process
    Patent number: 4304983
    Abstract: A plasma etching device having a quartz cylinder surrounded by RF energized electrodes or coils, contains a slotted aluminum tube into which wafers for etching are supported and processed. Each of the slots of the aluminum tube is provided with a shield extending longitudinally of the slot to intercept optical radiation, including deleterious ultraviolet (UV) radiation, of the plasma from entering the tube while still permitting the active etchant particles to pass into the tube to act on the wafers.
    Type: Grant
    Filed: June 26, 1980
    Date of Patent: December 8, 1981
    Assignee: RCA Corporation
    Inventor: Alfred J. Pierfederici