Patents by Inventor Alfred Pardubitzki

Alfred Pardubitzki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for producing a single crystal
    Patent number: 5567399
    Abstract: Apparatus for producing a single crystal of semiconductor material in accance with the Czochralski method, has a cooling means which cools the growing single crystal and is constructed in two parts, The first is an upper part duct system through which a liquid coolant flows. The second is a lower part which is a heat-conducting cooling body.
    Type: Grant
    Filed: January 26, 1996
    Date of Patent: October 22, 1996
    Assignee: Wacker Siltronic Gesellschaft fur Halbleitermaterialien AG
    Inventors: Wilfried Von Ammon, Erich Dornberger, Herber Weidner, Alfred Pardubitzki
  • Holding device and method for treating wafer-like objects, and a method of treating them
    Patent number: 5093550
    Abstract: A wafer holding device including a frame (2) which surrounds a wafer (1) ch is received without contact, which can be moved with the wafer having at least three holding elements (3) which are directed toward the outside circumference of the wafer and which can be changed from a holding position to a release position. The wafer can be supported in the holding device during many steps associated with movement in the production process so that a multiplicity of gripping and release operations which stress the wafer surface are unnecessary.
    Type: Grant
    Filed: April 10, 1990
    Date of Patent: March 3, 1992
    Assignee: Wacker-Chemitronic Gesellschaft fur Elektronic-Grundstoffe mbH
    Inventors: Hans A. Gerber, Georg Hochgesang, Alfred Pardubitzki, Manfred Schmiedlindl, Werner Zipf, Arthur Schweighofer