Abstract: The invention relates to an X-ray tube, especially a microfocus X-ray tube (2), comprising means (18) for orienting an electron beam (10) towards a target (4). A control device (20) is used to control the means for orienting the electron beam (10) towards the target (4) in such a way that the electron beam (10) scans the target (4), in addition to a measuring device (22) for measuring the intensity of the target current which flows to different scanning sites when the target (4) is scanned by the electron beam (10), or a measuring variable dependent on the target current, and an evaluation device (24) for associating each measured value of the target flow with the corresponding scanning site. Said X-ray tube enables the easy and economical implementation of a method for checking the operability of the target (4).

Abstract: The invention relates to an X-ray tube, especially a microfocus X-ray tube (2), comprising means (18) for orienting an electron beam (10) towards a target (4). A control device (20) is used to control the means for orienting the electron beam (10) towards the target (4) in such a way that the electron beam (10) scans the target (4), in addition to a measuring device (22) for measuring the intensity of the target current which flows to different scanning sites when the target (4) is scanned by the electron beam (10), or a measuring variable dependent on the target current, and an evaluation device (24) for associating each measured value of the target flow with the corresponding scanning site. Said X-ray tube enables the easy and economical implementation of a method for checking the operability of the target (4).

Abstract: X-ray tomosynthesis device includes a target and a device configured for directing a particle beam of electrically charged particles onto the target which emits X-ray radiation for irradiating a sample to be examined when the electrically charged particles strike the target, in use. The target includes at least one support element on which a plurality of mutually spaced target elements are provided, and each mutually spaced target element only partially covers the at least one support element. A deflection device is provided, and the deflection device is configured for causing the particle beam to be deflected in order to strike the plurality of mutually spaced target elements, in use.

Abstract: X-ray laminography and/or tomosynthesis apparatus includes a stationary X-ray tube with an X-ray source for generating X-rays for radiographic scanning of an object that is to be examined. The apparatus includes a stationary fixture for the object that is to be examined, and the stationary fixture being arranged in a stationary manner during a radiographic session. A stationary X-ray detector is provided for detecting the X-rays once the object which is to be examined has been radiographed. The X-ray detector is provided with a substantially planar detection surface whose dimensions are selected, taking into account the distance from the X-ray source to the object which is to be examined and the distance from the object which is to be detected to the X-ray detector, such that during scanning the X-rays always impinge the detection surface after radiographing the object.

Abstract: Nanofocus x-ray tube, includes a target, and a device for directing an electron beam onto the target. The target includes at least one target element made of a target material for generating x-rays, the at least one target element including a nanostructure having a diameter ?about 1000 nm. The nanostructure is formed by a microstructuring procedure on a substrate element made of a substrate material, and the target element only partly covers the substrate element. The electron beam cross-section of the x-ray tube, in use, is selected to be sufficiently larger than the cross-section of the target element, such that the electron beam always irradiates the entire surface of the target element. Still further, the substrate material may be diamond, or the substrate material may include diamond, and being doped to raise the electrical conductivity.

Abstract: Boring device for boring via holes for connecting contact regions of a first layer of a multilayer printed circuit board to contact regions of a second layer of the circuit board includes boring device for boring the via holes and control device for generating control signals for controlling boring device in accordance with via holes to be bored. A device is provided for determining a layer-to-layer misalignment between the first and second layers of the circuit board. Device is connected to control device for feeding a signal representing determined layer-to-layer misalignment to control device, which generates control signals as a function of determined layer-to-layer misalignment so that boring device bores via holes as a function of determined layer-to-layer misalignment. Boring device includes at least one laser for forming the via holes.

Abstract: Device for preparing a multilayer printed circuit board for the drilling of contact bores, which contact bores connect the contact surfaces of at least a first layer of the multilayer printed circuit board to contact surfaces of at least a second layer of the multilayer printed circuit board. The device for preparing a multilayer printed circuit board for the drilling of contact bores includes a device for determining a layer offset between the at least a first layer and the at least a second layer of the multilayer printed circuit board. The device for preparing a multilayer printed circuit board includes a device for applying at least one reference mark to the multilayer printed circuit board, and a device for determining drilling coordinates for the contact bores in relation to the at least one reference mark and based upon the determined layer offset.

Abstract: Device for generating and emitting XUV radiation includes a target which emits XUV radiation when impacted by electrically charged particles, in use. The target has a base, and the base is at least partially provided with a first layer. The first layer includes a material which emits XUV radiation when impacted by electrically charged particles, in use. Further, at least a second layer is provided, the at least a second layer including a material having a high electrical conductivity. A target which emits XUV radiation when impacted by electrically charged particles is provided for use with a device for generating and emitting XUV radiation.

Abstract: Device for generating X-ray or XUV radiation includes a device for directing a particle beam of electrically charged particles towards a target. A deflection device for deflecting the particle beam is such that the central axis of the particle beam passes through a first point of deflection and a second point of deflection located at a distance from the first point of deflection in the direction of propagation of the beam. The first and second points of deflection lie on an axis in line with a determined or determinable point of impact of the particle beam with the target. The particle beam can be deflected by the deflection device in the direction of propagation of the beam in the region of one point of deflection independently from of a deflection of the particle beam in the region of the other point of deflection.

Abstract: A method and an apparatus for regulating the intensity of x-ray radiation produced by an x-ray tube of a microfocus x-ray apparatus are provided. The x-ray tube is provided with a target, and a mechanism is provided for bombarding the target with a target stream. At least one parameter of the target stream, in particular a current strength thereof, is regulated.

Abstract: In microfocus X-ray equipment for enlarging radiographic short-time recordings, a focussed electron beam for the production of X-radiation (16) impinges on the retarding material of a target (23). In this case, the retarding material in the focal spot (22) passes over into the liquid aggregate state due to the high thermal loading. For this reason, the equipment is operated in pulsed operation, wherein the position of the focal spot (22) on the target (23) is, when each loading occurs, displaced relative to the previous position. The retarding material is arranged in a retarding layer (32) on a carrier layer (33) and the electron beam (16) impinges on the retarding layer (32) oriented perpendicularly to the electron beam (16). A control interrupts the irradiation at the latest when the carrier layer (33) starts to melt.

Abstract: In an X-ray tube having a glow cathode for emitting an electron beam, an anode, focusing and deflecting coils and a target in an evacuated envelope, the cathode is a U-bent filament the dimensions of which are large in relation to the electron emitting area. The cathode is heated by passing electric current through it and is differentially cooled so that a small surface area at the site of electron emission is at a substantially higher temperature than remaining surface areas of the cathode. Cooling is effected by a thick-walled cylindrical grid which surrounds the cathode and has at its outer end an annular inward projection which absorbs heat rays from the cathode. The grid has a funnel-shaped outer end surface having an included angle of about 100.degree. to 140.degree.. The electron emitting surface of the cathode lies approximately in a plane defined by the inner peripheral edge of the funnel-shaped end surface of the grid.