Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: In a device for manipulating an object for loading and unloading a clean room, the problem is to reduce the hardware expense for adjustment devices and for air conditioning while maintaining ergonomic benefits and to further improve the clean room conditions in the device. The device contains a stationary outer part (3) of a housing (2) as well as an inner part (4) that can extend telescopically from it and a receptacle element (11) in the roof area of the inner part (4). For the telescopic extension of the inner part and for the lowering of the receptacle element into the inner part, a common guide rail (16) and a common drive (20) are provided. The receptacle element connected to the drive engages with a driver of the inner part for the telescopic extension of the inner part by vertical upward movement and after reaching an access level (E2, E2), at which the inner part is secured, it can be lowered in the inner part.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: A device for coupling containers at a loading and unloading port with a horizontally displaceable platform for receiving the container has the object of increasing protection against faulty operation and faulty loading in a simple manner while guaranteeing technical cleanroom requirements and without limiting the clear space of the platform. An arrangement for detecting the presence of a container and for distinguishing between containers with different contents is provided for an expectancy area above the platform. The device is used for the loading and unloading at machining or processing stations of objects that are to be transported in a container, especially objects in the fabrication process for integrated circuits.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from containers under clean room conditions. These transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using an adhering engagement. The charging opening and transporting container are opened simultaneously in that the container cover and the closure are moved down jointy into the semiconductor processing installation.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: The object of a device for coupling loading and unloading devices with semiconductor machines is to couple devices required for the use of SMIF technology with semiconductor processing machines in which subsequent integration of SMIF technology is not possible, wherein the charging to be carried out after coupling is highly flexible and capable of managing increasing dimensions of semiconductor wafers. An adjustable receiving element for the loading and unloading device is provided inside a movable enclosure, this receiving element being displaceable between at least two planes situated one above the other, one plane serving for charging the loading and unloading device and every other plane being used for the charging of the semiconductor machine carried out by the loading and unloading device. The enclosure has aligning and holding elements for fastening to a coupling element which is aligned with the semiconductor processing machine.

Abstract: The invention is directed to a control system for an internal combustion engine with reference to air throughput, rotational speed and lambda. In this control system, a decoupling device is provided between open loop and closed loop control signals which act with different speeds. An ignition signal is influenced in dependence upon a lambda-dependent signal via at least one dead time member. In this way, phases having unfavorable opposing influence on control branches of different reaction durations are reduced.

Abstract: Wheel speed (V.sub.R) and braking pressure (P.sub.B) applied to a wheel are continuously measured and utilized to estimated values from a mathematical system model, to obtain the physical values: coefficient of friction (.mu.), vehicle speed (V.sub.F), slope of a slip curve (d.mu./dS), slip (S), and coefficient of friction of a stationary-rotary brake couple structure. At least one of the physical values so obtained, and preferably the coefficient of friction (.mu.), vehicle speed, and slope of wheel slip curve are used to control braking pressure being applied to the wheel. Braking pressure can be controlled for example for braking in accordance with coefficient of friction and slope of the friction-slip curve, for example to operate the wheel just before the coefficient of friction drops as the wheel begins to slip. Spinning of a wheel can be avoided by controlling the braking pressure to be below slippage value.

Abstract: Control signals for triggering the events to be controlled, via at least one output stage (13, 14), are generated in a vehicular computer (11) as a dependent function of the output signals of a sensor (10) coupled to a rotating shaft of the engine, and of further sensors dependent on other operating parameters. At least one sensor-controlled auxiliary control device (17, 18) is provided. The output signals of the auxiliary control devices (17, 18) are transmitted via a switching device (12) to the terminal control stages (13, 14) as an alternative to the output signals of the computer (11). The switching device (12) is preferably embodied as a multiplexer and is controllable by an error decoding stage (19) for decoding and monitoring serial, or parallel, signals of the computer (11) to determine proper function of the computer (11); in case of malfunction of the computer (11), decoding stage (19) causes control of the output stage, or stages (13, 14) from the respective auxiliary control device.

Abstract: A controller (13) provides control signals to an engine (E) to control its idling speed. To provide for additional fuel under special operating conditions--e.g. low engine temperature, starting conditions, placement of a sudden load such as connection of an air-conditioner or the like--a modification signal is generated in signal generators (17, 18, 19 . . . 19n) which signals are introduced into the path of the signals from the idle or command function generator (11) to a positioning element (15) which controls fuel supply to the engine. The engine itself can provide at least some of the signals to the function generators, for example by engine temperature transducers (ETt); engine speed transducers (ETn), to provide engine temperature signals. Starting can be sensed by sensing both engine speed and temperature, and/or operation of the starting switch.

Abstract: Disclosed is an electronic system for computing control magnitudes for a control system of an internal combustion engine. The control magnitudes are derived by computation from measured auxiliary parameters. The control magnitude such as suction pipe pressure is computed from its relationship with the flow rate of air mass, or throttle valve position and rotary speed. Atmospheric pressure is computed from the air mass flow, rotary speed and throttle valve position or from the cross-section of the channel by-passing the throttle valve and from the supplied air mass. The computation arrangement can be either analog or digital.

Abstract: The invention is directed to a method and an apparatus of determining whether the rotational speed of an internal combustion engine is attributable to a corresponding correcting quantity signal from an idle air charge control or whether an overrun condition exists. For this purpose, a variable supplementary signal is superposed on the correcting quantity signal of the idle air charge control. The mean value of this supplementary signal may be preferably zero. Taking the dead time of the internal combustion engine into account, the measured rotational speeds are correlated with the changes in the previously issued correcting quantity signals, and it is determined whether the engine is in the overrun mode of operation or idling. If an overrun condition is detected, an overrun recognition signal may be issued to initiate measures aimed at preventing the internal combustion engine from stalling, for example.

Abstract: Repetitive processes in internal combustion engines which are dependent upon the values of particular parameters are controlled either by a main computer or an auxiliary computer. Switching from the main to the auxiliary computer takes place if a sequence error detecting stage detects errors in the desired alternation between the main control signals furnished by the main computer and reference mark signals indicative of predetermined angular positions of a shaft of the engine. Specifically, the system is switched to operate under control of the auxiliary computer if such an alternation error occurs again within a predetermined number of cycles. The switching can also take place as a result of missing reference mark signals and as a result of the absence of monitoring signals indicative of correct operation of the main computer program.

Abstract: Control signals for triggering the events to be controlled, via at least one output stage (13, 14), are generated in a vehicular computer (11) as a dependent function of the output signals of a sensor (10) coupled to a rotating shaft of the engine, and of further sensors dependent on other operating parameters. At least one sensor-controlled auxiliary control device (17, 18) is provided. The output signals of the auxiliary control devices (17, 18) are transmitted via a switching device (12) to the terminal control stages (13, 14) as an alternative to the output signals of the computer (11). The switching device (12) is preferably embodied as a multiplexer and is controllable by an error decoding stage (19) for decoding and monitoring serial, or parallel, signals of the computer (11) to determine proper function of the computer (11); in case of malfunction of the computer (11), decoding stage (19) causes control of the output stage, or stages (13, 14) from the respective auxiliary control device.

Abstract: The switching off of one or more cylinders of a multicylinder engine to save fuel when the engine is running lightly loaded has been found to reduce the effectiveness of computer control of ignition timing and fuel injection unless additional fields of stored control information are provided for responding to the various combinations of engine parameter values that arise in operation. Accordingly, with each step of reduction of the number of working cylinders, the control of ignition timing and fuel injection is shifted to a different bank of fixed value memory (ROM).