Abstract: Aspects and embodiments disclosed herein include a method for forming a plurality of microfeatures, the method comprising: irradiating a starting multi-layer material with a pulsed laser beam at a plurality of locations of the multi-layer material; wherein: the starting multi-layer material comprises a plurality of starting layers comprising a first starting layer having a first composition and a second starting layer adjacent to the first starting layer and having a second composition different than the first composition; the plurality of microfeatures form in the multi-layer starting material during the step of irradiating; each microfeature comprises a plurality of microfeature layers comprising a first microfeature layer having the first composition and a second microfeature layer having the second composition. Optionally, each of the first and second composition is an inorganic material.