Patents by Inventor Alfred Thelen

Alfred Thelen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for the application of materials
    Patent number: 4885070
    Abstract: An apparatus to apply materials to a substrate disposed in a vacuum chamber is disclosed. A separate generator chamber containing an electron emitter is connected to the vacuum chamber by a process chamber so that a plasma of controllable cross-sectional shape and large area is formed and guided by magnets toward a target system. Positive ions may be accelerated against the target by applying an adjustable negative voltage.
    Type: Grant
    Filed: May 20, 1988
    Date of Patent: December 5, 1989
    Assignee: Leybold Aktiengesellschaft
    Inventors: Gregor A. Campbell, Robert W. Conn, Dan M. Goebel, Rolf Adam, Hans Aichert, Hans Betz, Anton Dietrich, Gonde Dittmer, Klaus Hartig, Friedrich Hass, Rainer Ludwig, Max Mayr, Alfred Thelen