Patents by Inventor Alfred Wolfgang Koenig

Alfred Wolfgang Koenig has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Maintaining the dimensions of features being etched on a lithographic mask
    Publication number: 20040224524
    Abstract: An apparatus for etching a metal-containing material of a lithographic mask has a chamber with a support for supporting the mask inside the chamber. Over the metal-containing material, the mask comprises a resist layer having features with sidewalls. A gas distributor, gas energizer, and gas exhaust are provided. A controller is provided that is adapted to control one or more of the gas distributor, gas energizer, and gas exhaust to (i) deposit a sacrificial coating on the sidewalls of the features in the resist layer, and (ii) etch the metal-containing material of the mask. Coincidental etching of the sidewalls of the features in the resist layer overlying the metal-containing material is reduced by the sacrificial coating formed thereon.
    Type: Application
    Filed: May 9, 2003
    Publication date: November 11, 2004
    Applicant: Applied Materials, Inc.
    Inventors: Alfred Wolfgang Koenig, Henry Christopher Hamaker, Walter Schoenleber