Patents by Inventor Alfredo Anderson

Alfredo Anderson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Non-contact temperature measurement of a film growing on a substrate
    Patent number: 5377126
    Abstract: Apparatus and method for non-contact temperature measurement of a film growing on a substrate which accounts for the change in emissivity due to the change in film thickness. The system employs an adaptively calibrated pyrometer wherein the substrate emittance is continuously computed so that the temperature measurement is accurate regardless of the emittance variation. The new system is easily constructed by adding data processing system software and hardware to conventional pyrometers.
    Type: Grant
    Filed: September 13, 1991
    Date of Patent: December 27, 1994
    Assignee: Massachusetts Institute of Technology
    Inventors: Markus I. Flik, Alfredo Anderson, Byungin Choi