Patents by Inventor Ali Shajii

Ali Shajii has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for the real time determination of the in situ emissivity and temperature of a workpiece during processing
    Patent number: 6375348
    Abstract: A system and method for determining the reflectivity of a workpiece during processing in a heating chamber of a thermal processing apparatus. The system first determines directly the reflectivity of the workpiece outside of the heating chamber of the thermal processing apparatus, and then determines the reflectivity of the workpiece during processing within the heating chamber of the thermal processing apparatus by correlating the ex situ wafer reflectivity with the intensity of the radiation reflected from the wafer within the heating chamber.
    Type: Grant
    Filed: November 13, 2000
    Date of Patent: April 23, 2002
    Assignee: Eaton Corporation
    Inventors: Jeffrey P. Hebb, Ali Shajii
  • System and method for the real time determination of the in situ emissivity of a workpiece during processing
    Patent number: 6183127
    Abstract: A system and method for determining the reflectivity of a workpiece during processing in a heating chamber of a thermal processing apparatus. The system first determines directly the reflectivity of the workpiece outside of the heating chamber of the thermal processing apparatus, and then determines the reflectivity of the workpiece during processing within the heating chamber of the thermal processing apparatus by correlating the ex situ wafer reflectivity with the intensity of the radiation reflected from the wafer within the heating chamber.
    Type: Grant
    Filed: March 29, 1999
    Date of Patent: February 6, 2001
    Assignee: Eaton Corporation
    Inventors: Jeffrey P. Hebb, Ali Shajii