Abstract: One or more first signals are obtained. The first signals indicate a current shape of an object placed on an end effector. The one or more first signals are compared to one or more second signals that each indicate a predefined shape for a process component on the end effector. A determination is made of whether a current placement of the object on the end effector satisfies a target placement criterion based on the comparison.

Abstract: A method for finding a center of a process kit and/or a process kit ring is provided. An object placed on an end effector is moved past a sensor of a manufacturing system. A first signal indicating a current shape of object is received from the sensor of the manufacturing system. A determination is made whether the first signal corresponds to a second signal indicating a predefined shape for a process kit and/or a process kit carrier. In response to a determination that the first signal corresponds to the second signal, a coordinate correspondence is determined between coordinates of a center of the object and coordinates of a center of the end effector. The determined coordinate correspondence indicates whether a current placement of the object on the end effector satisfies a target placement criterion.

Abstract: A method for finding a center of a process kit and/or a process kit ring is provided. An object placed on an end effector is moved past a sensor of a manufacturing system. A first signal indicating a current shape of object is received from the sensor of the manufacturing system. A determination is made whether the first signal corresponds to a second signal indicating a predefined shape for a process kit and/or a process kit carrier. In response to a determination that the first signal corresponds to the second signal, a coordinate correspondence is determined between coordinates of a center of the object and coordinates of a center of the end effector. The determined coordinate correspondence indicates whether a current placement of the object on the end effector satisfies a target placement criterion.

Abstract: A method includes positioning a robot in a plurality of postures in a substrate processing system relative to a fixed location in the substrate processing system and generating sensor data identifying a fixed location relative to the robot in the plurality of postures. The method further includes determining, based on the sensor data, a plurality of error values corresponding to one or more components of the substrate processing system and causing, based on the plurality of error values, performance of one or more corrective actions associated with the one or more components of the substrate processing system.

Abstract: A method includes positioning a robot in a plurality of postures in a substrate processing system relative to a fixed location in the substrate processing system and generating sensor data identifying a fixed location relative to the robot in the plurality of postures. The method further includes determining, based on the sensor data, a plurality of error values corresponding to one or more components of the substrate processing system and causing, based on the plurality of error values, performance of one or more corrective actions associated with the one or more components of the substrate processing system.

Abstract: One embodiment provides a method, including: detecting, using at least one sensor, a displacement event associated with a monopod jib, wherein the displacement event moves a portion of the monopod jib from a first position to a second position; calculating, using a processor, an adjustment value for at least one of a plurality of motors of a stabilization mechanism operatively coupled to the monopod jib, wherein the calculated adjustment value identifies a motor movement to counteract the displacement event; activating the at least one of a plurality of motors corresponding to the calculated adjustment value; and adjusting, using the activated at least one of the plurality of motors, at least one portion of the stabilization mechanism using the calculated adjustment value. Other embodiments are shown and described.

Abstract: One embodiment provides a method, including: detecting, using at least one sensor, a displacement event associated with a monopod jib, wherein the displacement event moves a portion of the monopod jib from a first position to a second position; calculating, using a processor, an adjustment value for at least one of a plurality of motors of a stabilization mechanism operatively coupled to the monopod jib, wherein the calculated adjustment value identifies a motor movement to counteract the displacement event; activating the at least one of a plurality of motors corresponding to the calculated adjustment value; and adjusting, using the activated at least one of the plurality of motors, at least one portion of the stabilization mechanism using the calculated adjustment value. Other embodiments are shown and described.