Patents by Inventor Alice Dalrymple

Alice Dalrymple has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Devices and Methods for Optical Endpoint Detection During Semiconductor Wafer Polishing
    Publication number: 20080032602
    Abstract: A method of measuring a change in thickness of a layer of material disposed on a wafer while polishing the layer. Light is directed at the surface of the wafer from an optical sensor disposed within the polishing pad. The intensity of the reflected light is measured by a light detector also disposed in the polishing pad. The intensity of the reflected light varies sinusoidally with the change in layer thickness as the layer is removed. By measuring the absolute thickness of the layer at two or more points along the sinusoidal curve, the sinusoidal curve is calibrated so that a portion of the wavelength of the curve corresponds to a change in thickness of the layer.
    Type: Application
    Filed: June 26, 2007
    Publication date: February 7, 2008
    Inventors: Alice Dalrymple, Robert Horrell
  • Devices and methods for optical endpoint detection during semiconductor wafer polishing
    Publication number: 20050150599
    Abstract: A method of measuring a change in thickness of a layer of material disposed on a wafer while polishing the layer. Light is directed at the surface of the wafer from an optical sensor disposed within the polishing pad. The intensity of the reflected light is measured by a light detector also disposed in the polishing pad. The intensity of the reflected light varies sinusoidally with the change in layer thickness as the layer is removed. By measuring the absolute thickness of the layer at two or more points along the sinusoidal curve, the sinusoidal curve is calibrated so that a portion of the wavelength of the curve corresponds to a change in thickness of the layer.
    Type: Application
    Filed: January 8, 2004
    Publication date: July 14, 2005
    Inventors: Alice Dalrymple, Robert Horrell