Patents by Inventor Alice F. Martin

Alice F. Martin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Anti-reflective coating conformality control
    Patent number: 6852473
    Abstract: A method for forming an anti-reflective coating on a semiconductor substrate, including providing a first vessel containing an anti-reflective coating component and a second vessel containing a solvent. The anti-reflective coating component from the first vessel and the solvent from the second vessel are supplied to a mixing chamber. The anti-reflective coating component and the solvent are mixed in the mixing chamber to form a product. The product is transferred to the semiconductor substrate. The product is applied to the semiconductor substrate to form the anti-reflective coating. A system for forming an anti-reflective coating on a semiconductor substrate, including a first vessel for containing an anti-reflective coating component and a second vessel for containing a solvent.
    Type: Grant
    Filed: April 28, 2003
    Date of Patent: February 8, 2005
    Assignees: Infineon Technologies Richmond, LP, Brewer Science Incorporated
    Inventors: William Roberts, Marlene Strobl, Paul Williams, Douglas J. Guerrero, Alice F. Martin
  • Anti-reflective coating conformality control
    Publication number: 20040058278
    Abstract: A method for forming an anti-reflective coating on a semiconductor substrate, including providing a first vessel containing an anti-reflective coating component and a second vessel containing a solvent. The anti-reflective coating component from the first vessel and the solvent from the second vessel are supplied to a mixing chamber. The anti-reflective coating component and the solvent are mixed in the mixing chamber to form a product. The product is transferred to the semiconductor substrate. The product is applied to the semiconductor substrate to form the anti-reflective coating. A system for forming an anti-reflective coating on a semiconductor substrate, including a first vessel for containing an anti-reflective coating component and a second vessel for containing a solvent.
    Type: Application
    Filed: April 28, 2003
    Publication date: March 25, 2004
    Applicants: Infineon Technologies Richmond, LP, Brewer Science Incorporated
    Inventors: William Roberts, Marlene Strobl, Paul Williams, Douglas J. Guerrero, Alice F. Martin