Patents by Inventor Aline Wullur

Aline Wullur has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DRY CLEANING METHOD FOR RECOVERING ETCH PROCESS CONDITION
    Publication number: 20130084707
    Abstract: A method of patterning a substrate is described. The method includes establishing a reference etch process condition for a plasma processing system. The method further includes transferring a mask pattern formed in a mask layer to one or more layers on a substrate using at least one plasma etching process in the plasma processing system to form a feature pattern in the one or more layers and, following the transferring, performing a multi-step dry cleaning process to substantially recover the reference etch condition. Furthermore, the multi-step dry cleaning process includes performing a first dry cleaning process step using plasma formed from a first dry clean process composition containing an oxygen-containing gas, and performing a second dry cleaning process step using plasma formed from a second dry clean process composition containing a halogen-containing gas.
    Type: Application
    Filed: September 30, 2011
    Publication date: April 4, 2013
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Mitsuru HASHIMOTO, Akiteru KO, Aline WULLUR
  • Method of fabricating an optical concentrator for a photovoltaic solar cell
    Patent number: 7312097
    Abstract: A method of fabricating a photovoltaic solar cell is provided. A plurality of generally spherical semiconductor elements are provided. Each of the semiconductor elements has a core and an outer surface surface forming a p-n junction. An anti-reflection coating is deposited on the outer surface of each of the semiconductor elements and each of the semiconductor elements is bonded into a perforated aluminum foil array thereby providing ohmic contact to a first side of the p-n junction. The anti-reflection coating is removed from a portion of each of the semiconductor elements and then the core is exposed, thereby allowing ohmic contact to be made to a second side of the p-n junction.
    Type: Grant
    Filed: May 23, 2005
    Date of Patent: December 25, 2007
    Assignee: Spheral Solar Power, Inc.
    Inventors: Milfred D Hammerbacher, Gary D Stevens, Paul R Sharrock, Aline Wullur, Frederic Rivollier
  • Method of fabricating an optical concent rator for a photovoltaic solar cell
    Publication number: 20050217721
    Abstract: A method of fabricating a photovoltaic solar cell is provided. A plurality of generally spherical semiconductor elements are provided. Each of the semiconductor elements has a core and an outer surface surface forming a p-n junction. An anti-reflection coating is deposited on the outer surface of each of the semiconductor elements and each of the semiconductor elements is bonded into a perforated aluminum foil array thereby providing ohmic contact to a first side of the p-n junction. The anti-reflection coating is removed from a portion of each of the semiconductor elements and then the core is exposed, thereby allowing ohmic contact to be made to a second side of the p-n junction.
    Type: Application
    Filed: May 23, 2005
    Publication date: October 6, 2005
    Inventors: Milfred Hammerbacher, Gary Stevens, Paul Sharrock, Aline Wullur, Frederic Rivollier
  • Method of fabricating an optical concentrator for a photovoltaic solar cell
    Patent number: 6897085
    Abstract: A method of fabricating a photovoltaic solar cell is provided. A plurality of generally spherical semiconductor elements are provided. Each of the semiconductor elements has a core and an outer surface surface forming a p-n junction. An anti-reflection coating is deposited on the outer surface of each of the semiconductor elements and each of the semiconductor elements is bonded into a perforated aluminum foil array thereby providing ohmic contact to a first side of the p-n junction. The anti-reflection coating is removed from a portion of each of the semiconductor elements and then the core is exposed, thereby allowing ohmic contact to be made to a second side of the p-n junction.
    Type: Grant
    Filed: January 21, 2003
    Date of Patent: May 24, 2005
    Assignee: Spheral Solar Power, Inc.
    Inventors: Milfred Dale Hammerbacher, Gary Don Stevens, Paul Ray Sharrock, Aline Wullur, Frederic Rivollier
  • Method of fabricating an optical concentrator for a photovoltaic solar cell
    Publication number: 20040140001
    Abstract: A method of fabricating a photovoltaic solar cell is provided. A plurality of generally spherical semiconductor elements are provided. Each of the semiconductor elements has a core and an outer surface surface forming a p-n junction. An anti-reflection coating is deposited on the outer surface of each of the semiconductor elements and each of the semiconductor elements is bonded into a perforated aluminum foil array thereby providing ohmic contact to a first side of the p-n junction. The anti-reflection coating is removed from a portion of each of the semiconductor elements and then the core is exposed, thereby allowing ohmic contact to be made to a second side of the p-n junction.
    Type: Application
    Filed: January 21, 2003
    Publication date: July 22, 2004
    Inventors: Milfred Dale Hammerbacher, Gary Don Stevens, Paul Ray Sharrock, Aline Wullur, Frederic Rivollier