Patents by Inventor Alireza S. Moghadam

Alireza S. Moghadam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate edge inspection
    Patent number: 8325334
    Abstract: An apparatus for inspecting an edge of a substrate. A light source produces a light beam, and a two-dimensional beam deflector receives the light beam and creates a semi-annular scanning beam. A first flared parabolic surface receives the semi-annular scanning beam and directs the semi-annular scanning beam onto the edge of the substrate, thereby creating specularly reflected light from the edge of the substrate. A second flared parabolic surface receives and directs the specularly reflected light to a detector. The detector receives the directed specularly reflected light and produces signals. An analyzer analyzes the signals and detects defects at the edge of the substrate.
    Type: Grant
    Filed: August 18, 2010
    Date of Patent: December 4, 2012
    Assignee: KLA-Tencor Corporation
    Inventors: Mahendra P. Ramachandran, Steven W. Meeks, Alireza S. Moghadam, Hung P. Nguyen
  • Substrate Edge Inspection
    Publication number: 20110058174
    Abstract: An apparatus for inspecting an edge of a substrate. A light source produces a light beam, and a two-dimensional beam deflector receives the light beam and creates a semi-annular scanning beam. A first flared parabolic surface receives the semi-annular scanning beam and directs the semi-annular scanning beam onto the edge of the substrate, thereby creating specularly reflected light from the edge of the substrate. A second flared parabolic surface receives and directs the specularly reflected light to a detector. The detector receives the directed specularly reflected light and produces signals. An analyzer analyzes the signals and detects defects at the edge of the substrate.
    Type: Application
    Filed: August 18, 2010
    Publication date: March 10, 2011
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Mahendra P. Ramachandran, Steven W. Meeks, Alireza S. Moghadam, Hung P. Nguyen