Abstract: An article includes a substrate container for holding one or more substrates or reticles. The substrate container has a housing including one or more sidewalls, a closed end, an open end, and an interior space defined by the one or more side walls and the closed end. The container further has a door configured to close the open end of the housing. The door includes a door body having a seal coupling portion. The door body is formed of a door body polymer. The door further includes a seal member integrally formed with the seal coupling portion of the door body.

Abstract: A microenvironment including a shell structure, the shell structure configured to hold semiconductor wafers, wherein the microenvironment includes a blend of cyclo olefin copolymer and one or more polyolefin polymers. The blend may further include a conductive material, such as carbon nanotubes to enhance conductivity of the blend. The blend may be free of impact agents, mold release agents, and plasticizers.

Abstract: Adsorbents can be structured for use in a wafer container microenvironment. The loading of these adsorbents can be tailored to the particular contaminants to be removed from the wafer container microenvironment. The loading can include adsorbents for one or more contaminants, the contaminants including acids, bases, condensable organic compounds, and/or volatile organic compounds. The adsorbent can further include a moisture removal material such as a molecular sieve. The contaminants to be removed can be determined by cleaning or staging conditions for the wafer container, testing of previous adsorbents used in processes.