Patents by Inventor Allan KETELSEN

Allan KETELSEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method to achieve tilted patterning with a through resist thickness
    Patent number: 11586112
    Abstract: Embodiments disclosed herein include a lithographic patterning system and methods of using such a system to form a microelectronic device. In an embodiment, the lithographic patterning system includes an actinic radiation source, a stage where a major surface of the stage is for supporting a substrate with a resist layer, and a first prism over the stage, where the first prism comprises a first face that is substantially parallel to the major surface of the stage. In an embodiment, the lithographic patterning system further comprises a second prism, where the second prism comprises a first surface that is substantially parallel to a second surface of the first prism, and where a second surface of the second prism has a reflective coating.
    Type: Grant
    Filed: August 23, 2018
    Date of Patent: February 21, 2023
    Assignee: Intel Corporation
    Inventors: Changhua Liu, Allan Ketelsen
  • METHOD TO ACHIEVE TILTED PATTERNING WITH A THROUGH RESIST THICKNESS
    Publication number: 20200064738
    Abstract: Embodiments disclosed herein include a lithographic patterning system and methods of using such a system to form a microelectronic device. In an embodiment, the lithographic patterning system includes an actinic radiation source, a stage where a major surface of the stage is for supporting a substrate with a resist layer, and a first prism over the stage, where the first prism comprises a first face that is substantially parallel to the major surface of the stage. In an embodiment, the lithographic patterning system further comprises a second prism, where the second prism comprises a first surface that is substantially parallel to a second surface of the first prism, and where a second surface of the second prism has a reflective coating.
    Type: Application
    Filed: August 23, 2018
    Publication date: February 27, 2020
    Inventors: Changhua LIU, Allan KETELSEN