Patents by Inventor Allan Ward Upham

Allan Ward Upham has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Selective etching of silicon wafer
    Patent number: 11322361
    Abstract: An apparatus that includes a solution bath of a seasoned solution, the seasoned solution containing a mixture of hydrofluoric acid, nitric acid, and acetic acid; and one or more silicon wafers being suspended in a position above the solution bath, wherein at least a portion of the mixture having been used in thinning the one or more silicon wafers.
    Type: Grant
    Filed: August 13, 2019
    Date of Patent: May 3, 2022
    Assignee: International Business Machines Corporation
    Inventors: Da Song, Allan Ward Upham, Cornelius Brown Peethala, Kevin Winstel, Spyridon Skordas
  • SELECTIVE ETCHING OF SILICON WAFER
    Publication number: 20190371615
    Abstract: An apparatus that includes a solution bath of a seasoned solution, the seasoned solution containing a mixture of hydrofluoric acid, nitric acid, and acetic acid; and one or more silicon wafers being suspended in a position above the solution bath, wherein at least a portion of the mixture having been used in thinning the one or more silicon wafers.
    Type: Application
    Filed: August 13, 2019
    Publication date: December 5, 2019
    Inventors: Da Song, Allan Ward Upham, Cornelius Brown Peethala, Kevin Winstel, SPYRIDON SKORDAS