Abstract: Methods and apparatus for maintaining a quality of a Raman medium in a Raman conversion cell. In various examples, a flow velocity of the Raman medium is tailored based on a spatial nonuniformity of heat deposition resulting from the Raman conversion in the cell. In particular, in one example, the flow velocity of the Raman medium may be tailored to be higher where the heat deposition/temperature rise is larger and smaller elsewhere in the cell. This type of flow velocity profile reduces the overall required volumetric flow of the Raman medium in the cell without significantly affecting a quality of the Raman medium.

Abstract: Methods and apparatus for maintaining a quality of a Raman medium in a Raman conversion cell. In various examples, a flow velocity of the Raman medium is tailored based on a spatial nonuniformity of heat deposition resulting from the Raman conversion in the cell. In particular, in one example, the flow velocity of the Raman medium may be tailored to be higher where the heat deposition/temperature rise is larger and smaller elsewhere in the cell. This type of flow velocity profile reduces the overall required volumetric flow of the Raman medium in the cell without significantly affecting a quality of the Raman medium.

Abstract: A method and apparatus for enhancing the precision of distance or position measurements using a two-wavelength interferometer is disclosed. The invention provides for the direct measurement of air density fluctuations, thus allowing for correction of measurement errors, including those due to air turbulence and air thermal variations in a measurement path of a distance measuring interferometer. The invention can function both as a precision enhancement to an existing interferometric measuring system, or as a stand-alone system, measuring both “uncorrected” distance and air density and providing a corrected distance value. A novel measurement head design removes the constraint that a measurement and a reference component of the interferometer optical signals travel a shared path at any point in the interferometer, and thus substantially reduces errors due to polarization leakage.

Abstract: An ultra high resolution wave focusing method and apparatus is disclosed. The invention provides a focusing system having an effective numerical aperture greater than that possible using known conventional focusing techniques. By the method and apparatus of the invention, a wave of arbitrary wavefront profile and wavelength .lambda. is focused to a region of high amplitude having a spot size that approaches the fundamental limit of 0.25.lambda.. Imaging and patterning systems employing such a wave focusing method and apparatus provide ultra high resolution and ultra small feature sizes beyond the capabilities of systems utilizing conventional focusing elements.