Abstract: Various embodiments provide a substrate carrier configured to rotatably carry at least one substrate through a plurality of processing stations. The substrate carrier includes an integrated heater for heating a first side of the substrate while the second side of the substrate undergoes one or more manufacturing processes at each of the plurality of processing stations, e.g., to promote the desired growth of HAMR media. This can result in the elimination of one or more processing stations, thereby realizing cost savings, decreased substrate processing time, as well as a reduced area within which a substrate processing system can be implemented.

Abstract: A station for a disk processing system includes a load lock chamber, a variable conductance valve configured to connect the chamber to a vacuum pump, and valve controller. The valve controller may include a processor that controls an electromechanical actuator to adjust the conductance of the valve during the evacuation of the chamber.

Abstract: A processing system for and a method of producing ions inside a process chamber and shielding the ions from a magnetic field by directing the magnetic field through a magnet keeper is described.

Abstract: A disk processing system having a plurality of processing chambers, a load chamber comprising a heater, and a disk transport system coupled to the plurality of processing chambers and the load chamber to transport a disk there among.

Abstract: A disk processing system having a plurality of processing chambers, a load chamber comprising a heater, and a disk transport system coupled to the plurality of processing chambers and the load chamber to transport a disk there among.

Abstract: A disk processing system having a plurality of processing chambers, a load chamber comprising a heater, and a disk transport system coupled to the plurality of processing chambers and the load chamber to transport a disk there among.

Abstract: A target assembly for use in forming a protective overcoat in a magnetic recording medium is described. The assembly includes a centrally positioned target with inner and outer magnetic means adjacent the target. A sputtering shield is positioned between the target and the medium for controlling the amount and angle of material deposition on the medium. The assembly is effective to deposit an overcoat having a greater thickness in the inner landing zone of the medium than in the outer data zone. A method of using the assembly is also disclosed.

Abstract: A method for forming an overcoat having first and second layers in a magnetic recording medium is described. The first overcoat layer is deposited in a first sputtering chamber where the magnetic means for confining target plasma in the chamber are oriented to retain magnetic-field confinement about the target surface and to produce magnetic field lines between directly confronting portions of the confronting sputtering targets. The second overcoat layer is deposited under a nitrogen-containing atmosphere.

Abstract: A method of producing a magnetic recording medium by sputtering a layer onto a substrate by DC-magnetron sputtering from a target while exposing the target to an RF signal is described. The RF signal is effective to extend the target utilization without significantly decreasing the sputtering rate. Also disclosed is an apparatus for use forming a medium in accordance with the method of the invention.

Abstract: A sputtering assembly for use in forming sputter deposited layers on a substrate is described. The assembly includes a pair of confronting sputtering targets for depositing sputtered layers onto the substrate and a movably mounted heating means for heating the substrate. A method of using the assembly is also disclosed.

Abstract: A cathode assembly having a magnetic-field shunt for use in a magnetron sputtering apparatus is described. The magnetic-field shunt disposed between a sputtering target and a source of magnetic flux, and the shunt is moveable between first and second positions to effect preferential target erosion at first and second target regions, respectively. A method of using the assembly for preparation of a magnetic recording medium is also described.

Abstract: A longitudinal magnetic recording medium formed on a non-metallic substrate and a method of forming the medium is disclosed. A sublayer formed of a chromium alloy having a thickness between 3-50 .ANG. is deposited on the substrate, followed by a chromium-based underlayer. A cobalt-based magnetic recording layer is sputtered over the underlayer. The medium is characterized by improved coercivity, HF signal amplitude and signal-to-noise ratio.

Abstract: A target assembly for use in fabricating magnetic recording media is described. The target assembly has inner and outer concentric targets for sputter depositing on a substrate first and second layers having different compositions. Disposed adjacent each target is a magnetic means, and at least one which is reversible in magnetic-pole polarity. One polarity produces a magnetic flux sufficient to ignite a sputtering plasma in the inner target only, when power is supplied to the inner target at a preselected level. The opposite polarity produces a magnetic flux sufficient to ignite a sputtering plasma in the outer target only, when power is supplied to the outer target at a preselected level.

Abstract: A target assembly is provided having a circular flat target with an inner ring and an outer ring extending from the sputtering surface. A ferromagnetic outer pole member surrounds the target and the outer ring. A ferromagnetic inner pole member is surrounded by the target and the inner ring. A ferromagnetic backing member is positioned against the base surface of the target and has an outer portion positioned against the outer pole member, and an inner portion positioned against the inner pole member. These are positioned relative to the source of the magnetic field for conducting flux in a first path through the outer portion and the outer pole member, across the sputtering surface between the outer and inner rings, and through the inner pole member and inner portion. The backing member further includes a shunt portion intermediate between and magnetically spaced from the inner and outer portions.