Abstract: An ion implantation system has an ion source configured form an ion beam and an angular energy filter (AEF) having an AEF region. A gas source passivates and/or etches a film residing on the AEF by a reaction of the film with a gas. The gas can be an oxidizing gas or a fluorine-containing gas. The gas source can selectively supply the gas to the AEF region concurrent with a formation of the ion beam. The AEF is heated to assist in the passivation and/or etching of the film by the gas. The heat can originate from the ion beam, and/or from an auxiliary heater associated with the AEF. A manifold distributor can be operably coupled to the gas source and configured to supply the gas to one or more AEF electrodes.

Abstract: An ion implantation system has an ion source configured form an ion beam and an angular energy filter (AEF) having an AEF region. A gas source passivates and/or etches a film residing on the AEF by a reaction of the film with a gas. The gas can be an oxidizing gas or a fluorine-containing gas. The gas source can selectively supply the gas to the AEF region concurrent with a formation of the ion beam. The AEF is heated to assist in the passivation and/or etching of the film by the gas. The heat can originate from the ion beam, and/or from an auxiliary heater associated with the AEF. A manifold distributor can be operably coupled to the gas source and configured to supply the gas to one or more AEF electrodes.

Abstract: A heat exchanger includes a plurality of flat, multi-channel heat exchange tubes extending between spaced headers. Each heat exchange tube has a plurality of flow channels extending longitudinally in parallel relationship from its inlet end to its outlet end. A plurality of connectors are positioned between the inlet header and the heat transfer tubes such that the connector inlet ends are in fluid flow communication with the header through a relatively small cross-sectional flow area openings and the connector outlet ends are adapted to receive the inlet end of a heat exchanger tube. The connector defines a fluid flow pathway from the relatively small cross-sectional flow area opening in the inlet end of the connector to an outlet opening in the outlet end of the connector that opens to the flow channels of the heat exchange tube received in the outlet end of the connector.

Abstract: An inlet header (22) of a microchannel heat pump heat exchanger has a tube (34) disposed therein and extending substantially the length of the inlet header (22), with the tube (34) having a plurality of openings (36) therein. During cooling mode operation, refrigerant is caused to flow into an open end of the tube (34) and along its length to thereby flow from the plurality of openings (36) into the inlet header (22) prior to entering the microchannels (24) to thereby provide a uniform flow of two-phase refrigerant thereto. A bi-flow expansion device (41) placed at the inlet end of the tube (34) allows for the expansion of liquid refrigerant into the tube (34) during periods in which the heat exchanger operates as an evaporator and allows the refrigerant to flow directly from the header (22) and around the tube (34) during periods in which the heat exchanger operates as a condenser coil.

Abstract: In a parallel flow heat exchanger having an inlet manifold connected to an outlet manifold by a plurality of parallel channels, a spirally shaped insert is disposed within the refrigerant flow path in the inlet manifold such that a swirling motion is imparted to the refrigerant flow in the manifold so as to cause a more uniform distribution of refrigerant to the individual channels. Various embodiments of the spirally shaped inserts are provided, including inserts designed for the internal flow of refrigerant therethrough and/or the external flow of refrigerant thereover.

Abstract: In a parallel flow evaporator, the inlet manifold construction consists of alternating expansion and contraction chambers to promote homogeneous conditions of the refrigerant, as it flows longitudinally through the inlet manifold, as a result of partial evaporation (throttling) and mixing and jetting effects (due to velocity augmentation). In a preferred embodiment, the parallel channels are fluidly connected to the expansion chambers so as to receive a homogeneous refrigerant mixture therefrom. In one embodiment, the expansion and contraction chambers are progressively smaller in size toward a downstream end, so as to accommodate the diminishing refrigerant flow as it progresses longitudinally along the inlet manifold. In another embodiment, the outlet manifold also consists of a repetitive pattern of alternating expansion and contraction chambers, so as to balance the impedances of the inlet manifold.

Abstract: In a parallel flow heat exchanger, which is susceptible to having a non-uniform distribution of a two-phase refrigerant flow to the individual channels, the resultant differences in the refrigerant flow therethrough are compensated and counter-balanced by a corresponding difference in the external heat transfer rate for the respective channels. In one embodiment, these differences are accomplished by variable characteristics of extended heat transfer surface elements such as fin type, fin density, fin geometry and difference in construction materials, and in another embodiment, by varying the airflow distribution over the cross-section area of the heat exchanger.

Abstract: In a parallel flow heat exchanger having an inlet manifold connected to a plurality of parallel channels, the degree of insertion depth of the parallel channels into the inlet manifold is variable so as to adjust the impedance to the refrigerant flow into the individual channels. The degree of insertion depth is progressively reduced toward a downstream end of the manifold for the individual channels or for the channel sections. The diameter of the inlet manifold is locally increased or its cross-section area altered in order to accommodate the flow of refrigerant around the tube insertions. Similar technique is applied to the outlet manifold as well to further balance hydraulic resistances.

Abstract: A comb-like insert having a body and plurality of tapered fingers is installed with its fingers disposed within respective minichannels. The fingers and their respective minichannels are so sized as to restrict the channels and frictionally hold the insert in place in one dimension while providing for gaps in another dimension such that the flow of refrigerant is somewhat obstructed but allowed to pass through the gaps between the insert fingers and the minichannel walls and then expand as it passes along the tapered fingers to thereby provide a more homogenous mixture to the individual minichannels. A provision is also made to hold the insert in its installed position by way of internal structure within the inlet manifold. In one embodiment, an internal plate is provided for that purpose, and the plate has openings formed therein for the equalization of pressure on either side thereof.