Patents by Inventor Allen Timko

Allen Timko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for Imaging a Photoresist Coated over an Antireflective Coating
    Publication number: 20090162800
    Abstract: The process of the present invention relates to imaging a photoresist film coated over an antireflective coating film comprising a) forming an antireflective coating film from an antireflective coating composition, where the composition comprises a siloxane polymer, b) treating the antireflective film with an aqueous alkaline treating solution, c) rinsing the antireflective film treated with an aqueous rinsing solution, d) forming a coating of a photoresist over the film of the antireflective coating composition, e) imagewise exposing the photoresist film, and, f) developing the photoresist with an aqueous alkaline developing solution.
    Type: Application
    Filed: December 20, 2007
    Publication date: June 25, 2009
    Inventors: David Abdallah, Alberto Dioses, Allen Timko, Ruzhi Zhang