Patents by Inventor Allison Yao

Allison Yao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE STRESS UNIFORMITY MANAGEMENT BASED ON OVERLAY ERROR MEASUREMENTS
    Publication number: 20240427979
    Abstract: A method includes obtaining, by a processing device, first data indicative of overlay error of a substrate. The method further includes generating second data indicative of first stress uniformity of the substrate based on the first data. The method further includes performing a corrective action based on the second data.
    Type: Application
    Filed: June 24, 2024
    Publication date: December 26, 2024
    Inventors: Zhiling Dun, Allison Yao, Jingmin Leng, Xinhai Han, Deenesh Padhi