Patents by Inventor Alois Gutman

Alois Gutman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Strongly water-soluble photoacid generator resist compositions
    Patent number: 6383715
    Abstract: A chemically amplified resist composition that eliminates blob defects when used to produce semiconductor devices comprising: a base polymer with a protected group; a solvent; and a photoacid generator comprising an iodonium salt containing a water-soluble group of a sulphonium group containing a water-soluble group.
    Type: Grant
    Filed: June 28, 2000
    Date of Patent: May 7, 2002
    Assignee: Infineon Technologies AG
    Inventors: Zhijian Lu, Alois Gutman