Patents by Inventor ALPING WU

ALPING WU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • COMPOSITIONS FOR REMOVING ETCH RESIDUES, METHODS OF USING AND USE THEREOF
    Publication number: 20220251480
    Abstract: This disclosed and claimed subject matter relates to a post etch residue cleaning compositions that include an alkanolamine having two or more or more than two alkanol groups, an alpha-hydroxy acid and water as well as methods for use thereof in microelectronics manufacturing.
    Type: Application
    Filed: July 14, 2020
    Publication date: August 11, 2022
    Applicant: Versum Materials US, LLC
    Inventors: Laisheng Sun, LILI WANG, ALPING WU, YI-CHIA LEE, TIANNIU R. CHEN