Abstract: Optical and computational components are combined to form a high precision, six degree-of-freedom, single-sided, noncontact position measurement system. Reflective optical targets are provided on a target object whose position is to be sensed. Light beams are directed toward the optical targets, producing reflected beams. Electrical signals are produced indicating the points of intersection of the reflected beams and the position-sensitive detectors. The position sensitive detectors may be lateral-effect photodiodes. The signals are transformed to provide measurements of translation along and rotation around three nonparallel axes which define the space in which the target object moves.

Abstract: Optical and computational components are combined to form high precision, six degree-of-freedom, single-sided, noncontact position measurement systems. Reflective optical targets are provided on a target object whose position is to be sensed. Light beams are directed toward the optical targets, producing reflected beams. Electrical signals are produced by movements of reflected beams across position-sensitive detectors, such as lateral-effect photodiodes. The signals are transformed to provide measurements of translation along and rotation around three nonparallel axes which define the space in which the target object moves.