Patents by Inventor Alvin Sather

Alvin Sather has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for hardening the wear portion of a retaining ring
    Publication number: 20050005416
    Abstract: A one piece plastic or two piece, metal and plastic, retaining ring used for chemical mechanical polishing of semiconductor substrates. In one embodiment, the plastic is selected from polyphenylene sulfide (PPS), polyethylene terephthalate, polyetheretherketone, polybutylene terephthalate, Ertalyte TX, PEEK, Torlon, Delrin, PET, Vespel, or Duratrol. The plastic wear surface is hardened by electron beam or gamma ray irradiation.
    Type: Application
    Filed: July 8, 2004
    Publication date: January 13, 2005
    Inventors: Alvin Sather, Carlos Leitao