Patents by Inventor Alwin DE KOCK

Alwin DE KOCK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
    Patent number: 9835957
    Abstract: A support table to support a surface of a substrate, wherein the support table includes: a base surface substantially parallel to the surface of the substrate, a plurality of burls protruding above the base surface, each of the burls having a respective distal end and a first height above the base surface, the burls arranged such that, when the substrate is supported by the support table, the substrate is supported by the respective distal ends, and a plurality of elongate raised protrusions separated by gaps, each of the elongate raised protrusions having a second height above the base surface, wherein the elongate raised protrusions protrude above the base surface between the burls, and the second height is less than the first height; wherein the protrusions are arranged such that a plurality of the gaps are aligned to form a straight gas flow path towards an edge of the base surface.
    Type: Grant
    Filed: September 2, 2014
    Date of Patent: December 5, 2017
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Martijn Houben, Alwin De Kock, Hendrikus Johannes Marinus Van Abeelen, Marco Adrianus Peter Van Den Heuvel
  • SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
    Publication number: 20160187791
    Abstract: A support table to support a surface of a substrate, wherein the support table includes: a base surface substantially parallel to the surface of the substrate, a plurality of burls protruding above the base surface, each of the burls having a respective distal end and a first height above the base surface, the burls arranged such that, when the substrate is supported by the support table, the substrate is supported by the respective distal ends, and a plurality of elongate raised protrusions separated by gaps, each of the elongate raised protrusions having a second height above the base surface, wherein the elongate raised protrusions protrude above the base surface between the burls, and the second height is less than the first height; wherein the protrusions are arranged such that a plurality of the gaps are aligned to form a straight gas flow path towards an edge of the base surface.
    Type: Application
    Filed: September 2, 2014
    Publication date: June 30, 2016
    Applicant: ASML Netherlands B.V.
    Inventors: Martijn HOUBEN, Alwin DE KOCK, Hendrikus Johannes Marinus VAN ABEELEN, Marco Adrianus Peter VAN DEN HEUVEL