Patents by Inventor Alyssa N. Scarbrough

Alyssa N. Scarbrough has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11950415
    Abstract: Some embodiments include an integrated assembly having a memory region and another region adjacent the memory region. Channel-material-pillars are arranged within the memory region, and conductive posts are arranged within said other region. A source structure is coupled to lower regions of the channel-material-pillars. A panel extends across the memory region and the other region. Doped-semiconductor-material is directly adjacent to the panel within the memory region and the other region. The doped-semiconductor-material is at least part of the source structure within the memory region. Liners are directly adjacent to the conductive posts and laterally surround the conductive posts. The liners are between the conductive posts and the doped-semiconductor-material. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: January 29, 2021
    Date of Patent: April 2, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Alyssa N. Scarbrough, Jordan D. Greenlee, John D. Hopkins
  • Patent number: 11950416
    Abstract: Some embodiments include an integrated assembly having a first memory region, a second memory region offset from the first memory region, and an intermediate region between the first and second memory regions. Channel-material-pillars are arranged within the memory regions. Conductive posts are arranged within the intermediate region. A panel extends across the memory regions and the intermediate region. The panel is laterally between a first memory-block-region and a second memory-block-region. Doped-semiconductor-material is within the memory regions and the intermediate region, and is directly adjacent to the panel. The doped-semiconductor-material is at least part of conductive source structures within the memory regions. Insulative rings laterally surround lower regions of the conductive posts and are between the conductive posts and the doped-semiconductor-material. Insulative liners are along upper regions of the conductive posts. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: February 1, 2021
    Date of Patent: April 2, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Alyssa N. Scarbrough, John D. Hopkins, Jordan D. Greenlee
  • Patent number: 11948639
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers comprising laterally-spaced memory-block regions having horizontally-elongated trenches there-between. Two of the first tiers have different vertical thicknesses relative one another. Channel-material strings of memory cells extend through the first tiers and the second tiers. Through the horizontally-elongated trenches, first conductive material is formed in void space in the two first tiers. The first conductive material fills the first tier of the two first tiers that has a smaller of the different vertical thicknesses in individual of the memory-block regions. The first conductive material less-than-fills the first tier of the two first tiers that has a larger of the different vertical thicknesses in the individual memory-block regions.
    Type: Grant
    Filed: July 6, 2021
    Date of Patent: April 2, 2024
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, Alyssa N. Scarbrough
  • Publication number: 20240081070
    Abstract: Source terminals of memory devices and related apparatuses, computing systems, and methods are disclosed. An apparatus includes a first polysilicon material, a second polysilicon material offset from the first polysilicon material, an intervening polysilicon material between the first polysilicon material and the second polysilicon material, and pillars defining memory cells. The pillars extend through the second polysilicon material and a proximal portion of the intervening polysilicon material into the first polysilicon material. The one or more insulative materials are at a distal edge of the intervening polysilicon material. The intervening polysilicon material is thicker at the distal edge than at the pillars. A method includes removing, using an isotropic etch process, portions of the first polysilicon material and the second polysilicon material in a trench and forming the intervening polysilicon material between the first polysilicon material and the second polysilicon material.
    Type: Application
    Filed: September 6, 2022
    Publication date: March 7, 2024
    Inventors: Alyssa N. Scarbrough, John D. Hopkins, Jordan D. Greenlee
  • Publication number: 20240074202
    Abstract: A method used in forming memory circuitry comprises forming a stack comprising vertically-alternating first tiers and second tiers. The stack extends from a memory-array region into a stair-step region. The stair-step region comprises a flight of stairs extending along a first direction. The first tiers are conductive and the second tiers are insulative at least in a finished-circuitry construction. An anisotropically-etched spacer is formed extending along the first direction directly above the flight of stairs. The anisotropically-etched spacer is used as a mask while etching through one of the first tiers and one of the second tiers in individual of the stairs to form multiple different-depth treads in the individual stairs along a second direction that is orthogonal to the first direction. Individual of the treads comprise conducting material of individual of the first tiers in the finished-circuitry construction. Other aspects, including structure independent of method, are disclosed.
    Type: Application
    Filed: August 29, 2022
    Publication date: February 29, 2024
    Applicant: Micron Technology, Inc.
    Inventors: John D. Hopkins, Alyssa N. Scarbrough
  • Publication number: 20240074182
    Abstract: Memory circuitry comprising strings of memory cells comprises a stack comprising vertically-alternating insulative tiers and conductive tiers. Channel-material strings of memory cells extend through the insulative tiers and the conductive tiers in a memory-array region. The insulative tiers and the conductive tiers extend from the memory-array region into a stair-step region. The stair-step region comprises a flight of stairs extending along a first direction. Multiple different-depth treads in individual of the stairs extend along a second direction that is orthogonal to the first direction. Individual of the multiple different-depth treads comprise conducting material of one of the conductive tiers. The multiple different-depth treads in the individual stairs comprise in lateral-succession along the second direction a first higher-depth tread, a lower-depth tread, and a second higher-depth tread. Methods are also disclosed.
    Type: Application
    Filed: August 29, 2022
    Publication date: February 29, 2024
    Applicant: Micron Technology, Inc.
    Inventors: John D. Hopkins, Alyssa N. Scarbrough
  • Publication number: 20240071816
    Abstract: Methods, systems, and devices for staircase formation in a memory array are described. A liner composed of a first liner material may be deposited on a tread and a first portion of the liner may be doped. After doping the first portion of the liner, a second portion of the liner may be converted into a second liner material using a chemical process. After converting the second portion of the liner into the second liner material, the first portion of the liner material may be removed so that a subsequent removal process can expose a first sub-tread. After exposing the first sub-tread, the second portion of the liner may be removed so that a second sub-tread is exposed.
    Type: Application
    Filed: August 26, 2022
    Publication date: February 29, 2024
    Inventors: Alyssa N. Scarbrough, Lifang Xu, Jordan D. Greenlee
  • Publication number: 20240071502
    Abstract: Methods, systems, and devices for staircase formation in a memory array are described. A first liner material may be deposited on a tread above a first contact surface and a portion of the first liner material may be doped. A second liner material may be deposited over the first liner and a portion of the second liner material may be doped. After doping the portions of the liner materials, the undoped portions of the liner materials may be removed so that the materials above a second contact surface can be at least partially removed via a first removal process. The doped portion of the first liner material may then be cut back so that a second removal process can expose the second contact surface and a third contact (while the first contact surface is protected from the removal process by the liner materials).
    Type: Application
    Filed: August 26, 2022
    Publication date: February 29, 2024
    Inventors: Alyssa N. Scarbrough, Lifang Xu, Jordan D. Greenlee
  • Publication number: 20240074183
    Abstract: Memory circuitry comprising strings of memory cells comprises a stack comprising vertically-alternating insulative tiers and conductive tiers. Channel-material strings of memory cells extend through the insulative tiers and the conductive tiers in a memory-array region. The insulative tiers and the conductive tiers extend from the memory-array region into a stair-step region. The stair-step region comprises a flight of stairs extending along a first direction. Multiple different-depth treads in individual of the stairs extend along a second direction that is orthogonal to the first direction. Individual of the multiple different-depth treads comprise conducting material of one of the conductive tiers. The multiple different-depth treads in the individual stairs comprise a first flight of the treads and a second flight of the treads. A landing is between and lower in the stack than each of the first and second flights of treads.
    Type: Application
    Filed: August 29, 2022
    Publication date: February 29, 2024
    Applicant: Micron Technology, Inc.
    Inventors: John D. Hopkins, Alyssa N. Scarbrough
  • Publication number: 20240071496
    Abstract: Memory circuitry comprising strings of memory cells comprises a stack comprising vertically-alternating insulative tiers and conductive tiers. Channel-material strings of memory cells extend through the insulative tiers and the conductive tiers in a memory-array region. The insulative tiers and the conductive tiers extend from the memory-array region into a stair-step region. The stair-step region comprises a cavity comprising a flight of stairs extending along a first direction. Multiple different-depth and height-sequential treads in individual of the stairs extend along a second direction that is orthogonal to the first direction. Individual of the multiple different-depth treads comprise conducting material of one of the conductive tiers. The cavity comprises a pair of laterally-opposing outermost sidewalls relative to the second direction and that individually extend along the first direction.
    Type: Application
    Filed: August 29, 2022
    Publication date: February 29, 2024
    Applicant: Micron Technology, Inc.
    Inventors: John D. Hopkins, Alyssa N. Scarbrough
  • Patent number: 11915974
    Abstract: Integrated circuitry comprises vertical conductive vias individually having a lower portion thereof that is directly against conductor material of islands. The islands comprise multiple different composition materials directly above the conductor material. Apart from the conductive vias, the islands individually comprise at least one of (a), (b), or (c), where: (a): a top material that is of different composition from all material that is vertically between the top material and the conductor material; (b): the top material having its top surface in a vertical cross-section extending laterally-outward beyond two opposing laterally-outermost edges of a top surface of the material that is immediately directly below the top material; and (c): is of different composition from that of an upper portion of the conductor material and including a portion thereof that is elevationally coincident with the conductor material or that is directly against the conductor material.
    Type: Grant
    Filed: April 12, 2021
    Date of Patent: February 27, 2024
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, Shuangqiang Luo, Alyssa N. Scarbrough
  • Patent number: 11910596
    Abstract: Some embodiments include an integrated assembly having a memory region and another region adjacent the memory region. Channel-material-pillars are arranged within the memory region, and conductive posts are arranged within said other region. A source structure is coupled to lower regions of the channel-material-pillars. A panel extends across the memory region and said other region, and separates a first memory-block-region from a second memory-block-region. Doped-semiconductor-material is directly adjacent to the panel within the memory region and the other region. Rings laterally surround lower regions of the conductive posts. The rings are between the conductive posts and the doped-semiconductor-material. The rings include laminates of two or more materials, with at least one of said two or more materials being insulative. Some embodiments include methods for forming integrated assemblies.
    Type: Grant
    Filed: April 6, 2021
    Date of Patent: February 20, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, Alyssa N. Scarbrough, John D. Hopkins
  • Patent number: 11895835
    Abstract: Integrated circuitry comprising a memory array comprises strings of memory cells comprising laterally-spaced memory blocks individually comprising a first vertical stack comprising alternating insulative tiers and conductive tiers. Strings of memory cells comprise channel-material strings that extend through the insulative tiers and the conductive tiers. The conductive tiers individually comprise a horizontally-elongated conductive line. A second vertical stack is aside the first vertical stack. The second vertical stack comprises an tipper portion and a lower portion. The upper portion comprises vertically alternating first tiers and second insulating tiers that are of different composition relative one another. The lower portion comprises an upper polysilicon-comprising layer, a lower polysilicon-comprising layer, an intervening-material layer vertically between the tipper and lower polysilicon-comprising layers.
    Type: Grant
    Filed: June 15, 2021
    Date of Patent: February 6, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Alyssa N. Scarbrough, Jordan D. Greenlee, John D. Hopkins
  • Publication number: 20240030285
    Abstract: Electronic devices comprising a source stack comprising one or more conductive materials, a source implant region within a top portion of the source stack, a source contact adjacent to the source stack, sidewalls of the source contact vertically adjacent to the source implant region, a doped semiconductive material adjacent to a source contact, tiers of alternating conductive materials and dielectric materials adjacent to the doped semiconductive material, and pillars extending through the tiers, the doped semiconductive material, and the source contact and into the source stack. Additional electronic devices are also disclosed, as are related methods and electronic systems.
    Type: Application
    Filed: July 20, 2022
    Publication date: January 25, 2024
    Inventors: Collin Howder, Alyssa N. Scarbrough
  • Publication number: 20230397424
    Abstract: A microelectronic device comprises a stack structure, a memory pillar, and a boron-containing material. The stack structure comprises alternating conductive structures and dielectric structures. The memory pillar extends through the stack structure and defines memory cells at intersections of the memory pillar and the conductive structures. The boron-containing material is on at least a portion of the conductive structures of the stack structure. Related methods and electronic systems are also described.
    Type: Application
    Filed: May 25, 2023
    Publication date: December 7, 2023
    Inventors: Jordan D. Greenlee, Everett A. McTeer, Rita J. Klein, John D. Hopkins, Nancy M. Lomeli, Xiao Li, Christopher R. Ritchie, Alyssa N. Scarbrough, Jiewei Chen, Sijia Yu, Naiming Liu
  • Publication number: 20230380158
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers. The stack comprises laterally-spaced memory-block regions and a through-array-via (TAV) region. The stack comprises channel-material strings extending through the first tiers and the second tiers. The stack comprises horizontally-elongated trenches extending through the first tiers and the second tiers and that are individually between immediately-laterally-adjacent of the memory-block regions. The stack comprises TAV openings in the TAV region. Conductive material is formed in the TAV openings and in the horizontally-elongated trenches at the same time. All of the conductive material is removed from the horizontally-elongated trenches while leaving the conductive material in the TAV openings to comprise TAVs therein in a finished circuitry construction. After the removing, intervening material is formed in the horizontally-elongated trenches.
    Type: Application
    Filed: May 17, 2022
    Publication date: November 23, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Alyssa N. Scarbrough, John D. Hopkins
  • Publication number: 20230377653
    Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a first vertical stack comprising vertically-alternating insulative tiers and conductive tiers. Strings of memory cells comprise channel-material strings that extend through the insulative tiers and the conductive tiers. A second vertical stack is aside the first vertical stack. The second vertical stack comprises an upper portion directly above a lower portion. The upper portion comprises vertically-alternating tiers that are of different composition relative one another. The lower portion comprises dummy plugs that comprise metal oxide directly above metal material. The metal oxide and the metal material comprise different compositions relative one another. Other embodiments, including method, are disclosed.
    Type: Application
    Filed: May 18, 2022
    Publication date: November 23, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Alyssa N. Scarbrough, John D. Hopkins, Jordan D. Greenlee
  • Publication number: 20230380172
    Abstract: Methods, systems, and devices for a barrier structure for preventing removal of, such as etching to, control circuitry are described. A memory device may include control circuitry over a substrate and for accessing a memory array and contact regions configured to couple with the control circuitry. The memory device may include barrier regions between respective contact regions that includes a barrier material. The memory device may include a stack of layers over the barrier region and the contact regions that is associated with the memory array, and the barrier material may prevent a removal (e.g., an etch) through the stack of layers and at least partially between contact regions from extending to the control circuitry.
    Type: Application
    Filed: May 19, 2022
    Publication date: November 23, 2023
    Inventors: John Hopkins, Jordan D. Greenlee, Daniel Billingsley, Alyssa N. Scarbrough
  • Publication number: 20230343394
    Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers directly above a conductor tier. Strings of memory cells comprise channel-material strings that extend through the insulative tiers and the conductive tiers. The channel-material strings directly electrically couple to conductor material of the conductor tier. Below the stack, an insulating tier is directly above the conductor tier and a metal-material tier is directly above the insulating tier. Conductive rings extend through the metal-material tier and the insulating tier to conductor material of the conductor tier. The conductive rings individually are around individual horizontal locations directly above which are individual of the channel-material strings. The channel-material strings directly electrically couple to the conductor material of the conductor tier through the insulating tier by the conductive rings.
    Type: Application
    Filed: April 22, 2022
    Publication date: October 26, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Alyssa N. Scarbrough, Jordan D. Greenlee, John D. Hopkins
  • Publication number: 20230335500
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a device including tiers of materials located one over another, the tiers of materials including respective memory cells and control gates for the memory cells. The control gates include respective portions that collectively form part of a staircase structure. The staircase structure includes first regions and second regions coupled to the first regions. The second regions include respective sidewalls in which a portion of each of the first regions and a portion of each of the second regions are part of a respective control gate of the control gates. The device also includes conductive pads electrically separated from each other and located on the first regions of the staircase structure, and conductive contacts contacting the conductive pads.
    Type: Application
    Filed: June 27, 2023
    Publication date: October 19, 2023
    Inventors: Alyssa N. Scarbrough, Yiping Wang, Jordan D. Greenlee, John Hopkins