Abstract: A cross-connect switch for fiber-optic communication networks employing a wavelength dispersive element, such as a grating, and a stack of regular (non-wavelength selective) cross bar switches using two-dimensional arrays of micromachined, electrically actuated, individually-tiltable, controlled deflection micromirrors for providing multiport switching capability for a plurality of wavelengths. Using a one-dimensional micromirror array, a fiber-optic based MEMS switched spectrometer that does not require mechanical motion of bulk components or large diode arrays can be constructed with readout capability for WDM network diagnosis or for general purpose spectroscopic applications.

Abstract: An integrated module including an array of electrostatically actuated mirrors usable as an optical switch. An array of tiltable mirrors is formed as a micro electromechanical system (MEMS) in one carrier substrate. A ceramic multi-chip module (MCM) is formed having multiple layers of wiring and electrodes at one surface forming one side part of the electrostatic capacitive actuators. The MEMS substrate is bonded to the carrier with the carrier electrodes in opposition to the mirrors, which form counter electrodes. Advantageously, a handle layer of the MEMS substrate is not removed and the mirrors released until after the bonding with the MCM. Separate high-voltage integrated circuits (ICs) driving the actuators and low-voltage ICs controlling the high-voltage ICs are bonded on the side of the MCM opposite the MEMS with the MCM providing electrical interconnections.