Patents by Inventor Aman Jain

Aman Jain has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for plating solution analysis and control
    Patent number: 9128493
    Abstract: A plating system comprises a plating solution and an apparatus for control of the plating solution, the apparatus including a Raman spectrometer for measurement of organic components, a visible light spectrometer for measurement of metallic components, and a pH probe. The plating solution can be sampled continuously or at intervals. Dosing of the plating solution adjusts for components consumed or lost in the plating process. The method of dosing is based on maintaining a desired composition of the plating solution.
    Type: Grant
    Filed: December 12, 2008
    Date of Patent: September 8, 2015
    Assignee: Lam Research Corporation
    Inventors: Ron Rulkens, Nanhai Li, Artur Kolics, Aman Jain, Darin Birtwhistle, Chee Chan
  • METHOD AND APPARATUS FOR PLATING SOLUTION ANALYSIS AND CONTROL
    Publication number: 20090157229
    Abstract: A plating system comprises a plating solution and an apparatus for control of the plating solution, the apparatus including a Raman spectrometer for measurement of organic components, a visible light spectrometer for measurement of metallic components, and a pH probe. The plating solution can be sampled continuously or at intervals. Dosing of the plating solution adjusts for components consumed or lost in the plating process. The method of dosing is based on maintaining a desired composition of the plating solution.
    Type: Application
    Filed: December 12, 2008
    Publication date: June 18, 2009
    Applicant: LAM Research Corporation
    Inventors: Ron Rulkens, Nanhai Li, Artur Kolics, Aman Jain, Darin Birtwhistle, Chee Chan