Abstract: The present invention features a micrometer-scale torsion balance device comprising a rigid mass and two or more nanoribbons attached to the rigid mass. The rigid mass may be suspended by the two or more nanoribbons. The two or more nanoribbons may be placed under tensile stress. A local acceleration value may be derived from a torsional stiffness of the two or more nanoribbons. In some embodiments, the rigid mass may comprise silicon. In some embodiments, the two or more nanoribbons may comprise silicon nitride. In some embodiments, the rigid mass may have a polygon shape, the polygon shape having four or more sides. A side of the four or more sides may be longer than all others.

Abstract: The present disclosure provides an optomechanical accelerometer that includes a first membrane having a first susceptibility; a second membrane having a second susceptibility that is greater than the first susceptibility; and at least one support member; wherein: the second membrane is supported above the first membrane by the at least one support member, such that the first and second membranes form at least a portion of an optical cavity.