Patents by Inventor Amedeo J. Granata

Amedeo J. Granata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reactor and susceptor for chemical vapor deposition process
    Patent number: 4522149
    Abstract: A reactor for use in a chemical vapor deposition process occurring in a radiant absorption heater system employs a vertical gas flow reaction vessel and a novel substantially solid susceptor configured as a truncated wedge. The susceptor is characterized by a high utilized area, resulting in a high wafer capacity and low power requirement.
    Type: Grant
    Filed: November 21, 1983
    Date of Patent: June 11, 1985
    Assignee: General Instrument Corp.
    Inventors: Dennis Garbis, Joseph Y. Chan, Amedeo J. Granata, Robert C. Heller
  • Susceptor for radiant absorption heater system
    Patent number: 4499354
    Abstract: A susceptor for use in a chemical vapor deposition process in a radiant absorption heating system comprises a heater adapted to absorb radiant energy and a sheath of high purity quartz completely surrounding the heater. The sheath further comprises dimples inside the sheath spacing the sheath from the heater. The heater may be graphite having a substantially pinhole-free outgas-inhibiting outer-coating such as silicon carbide.
    Type: Grant
    Filed: October 6, 1982
    Date of Patent: February 12, 1985
    Assignee: General Instrument Corp.
    Inventors: Lawrence B. Hill, Dennis Garbis, Robert C. Heller, Amedeo J. Granata