Patents by Inventor Amelia Heather-Sarah Church Hart

Amelia Heather-Sarah Church Hart has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PELLICLE COMPRISING SILICON CARBIDE NANOSTRUCTURE AND RELATED DEVICES AND METHODS
    Publication number: 20230176471
    Abstract: Disclosed are pellicles for use in extreme ultraviolet (EUV) lithography, the pellicles comprising silicon carbide nanostructures, and exhibiting high transmittance of EUV exposure light and high mechanical strength, as well as methods of using these pellicles.
    Type: Application
    Filed: November 29, 2022
    Publication date: June 8, 2023
    Inventors: Amelia Heather-Sarah Church Hart, James O'Neill